Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9790582 | Long lifetime thermal spray coating for etching or deposition chamber application | Chin-Yi Liu, Nash W. ANDERSON, David Schaefer | 2017-10-17 | $27,322,000 |
| 9546432 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Hong Shih, Lin Xu, John Michael Kerns, William Charles, John Daugherty +3 more | 2017-01-17 | $12,402,000 |
| 9123651 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Hong Shih, Lin Xu, John Michael Kerns, William Charles, John Daugherty +3 more | 2015-09-01 | $12,180,000 |