Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249490 | Single crystal metal oxide plasma chamber component | Lin Xu, Douglas DETERT, John Daugherty, Pankaj HAZARIKA, Satish SRINIVASAN +5 more | 2025-03-11 |
| 9873940 | Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus | Lin Xu, Hong Shih, Tom Stevenson, John Daugherty, John Michael Kerns +1 more | 2018-01-23 |
| 9790582 | Long lifetime thermal spray coating for etching or deposition chamber application | Chin-Yi Liu, Russell Ormond, David Schaefer | 2017-10-17 |