Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9899228 | Showerhead electrode assemblies for plasma processing apparatuses | Rajinder Dhindsa | 2018-02-20 |
| 9873940 | Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus | Lin Xu, Hong Shih, Nash W. ANDERSON, John Daugherty, John Michael Kerns +1 more | 2018-01-23 |
| 9546432 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Hong Shih, Lin Xu, John Michael Kerns, William Charles, John Daugherty +3 more | 2017-01-17 |
| 9123651 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Hong Shih, Lin Xu, John Michael Kerns, William Charles, John Daugherty +3 more | 2015-09-01 |
| 9028646 | Film adhesive for semiconductor vacuum processing apparatus | Dean J. Larson, Victor Wang | 2015-05-12 |
| 8975817 | Pressure controlled heat pipe temperature control plate | Michael C. Kellogg, Rajinder Dhindsa | 2015-03-10 |
| 8906164 | Methods for stabilizing contact surfaces of electrostatic chucks | Chris Kimball, Peter Muraoka | 2014-12-09 |
| 8701268 | Composite showerhead electrode assembly for a plasma processing apparatus | Dean J. Larson, Victor Wang | 2014-04-22 |
| 8679288 | Showerhead electrode assemblies for plasma processing apparatuses | Rajinder Dhindsa | 2014-03-25 |
| 8529729 | Plasma processing chamber component having adaptive thermal conductor | Michael Dickens | 2013-09-10 |
| 8449786 | Film adhesive for semiconductor vacuum processing apparatus | Dean J. Larson, Victor Wang | 2013-05-28 |
| 8418649 | Composite showerhead electrode assembly for a plasma processing apparatus | Dean J. Larson, Victor Wang | 2013-04-16 |
| 5588713 | Process for making sodium bicarbonate from Nahcolite-rich solutions | — | 1996-12-31 |