| 9103555 |
Multiple zone climate control system |
Shazhou Zou, Jian Mao, Tianxin Wang |
2015-08-11 |
| 9028646 |
Film adhesive for semiconductor vacuum processing apparatus |
Dean J. Larson, Tom Stevenson |
2015-05-12 |
| 8701268 |
Composite showerhead electrode assembly for a plasma processing apparatus |
Dean J. Larson, Tom Stevenson |
2014-04-22 |
| 8579182 |
Method for providing an inerting gas during soldering |
Chun Christine Dong, Jerry Wu, Ranajit Ghosh, Gregory Khosrov Arslanian |
2013-11-12 |
| 8449786 |
Film adhesive for semiconductor vacuum processing apparatus |
Dean J. Larson, Tom Stevenson |
2013-05-28 |
| 8418649 |
Composite showerhead electrode assembly for a plasma processing apparatus |
Dean J. Larson, Tom Stevenson |
2013-04-16 |
| 8220699 |
Apparatus and method for providing an inerting gas during soldering |
Chun Christine Dong, Gregory Khosrov Arsianian, Ranajit Ghosh, Jerry Wu |
2012-07-17 |
| 8084705 |
Quartz guard ring centering features |
Dean J. Larson, Daniel Arthur Brown, Keith Comendant |
2011-12-27 |
| 7875824 |
Quartz guard ring centering features |
Dean J. Larson, Daniel Arthur Brown, Keith Comendant |
2011-01-25 |
| 7832465 |
Affordable and easy to install multi-zone HVAC system |
Shazhou Zou, Jian Mao, Tianxin Wang |
2010-11-16 |
| 6843882 |
Gas flow control in a wafer processing system having multiple chambers for performing same process |
Karthik Janakiraman, Vikash Banthia, Teresa Winson, Nitin K. Ingle |
2005-01-18 |
| 5506500 |
Magnetic property characterization system employing a single sensing coil arrangement to measure both AC susceptibility and DC magnetization |
John K. Krause, Bradley C. Dodrill |
1996-04-09 |
| 5311125 |
Magnetic property characterization system employing a single sensing coil arrangement to measure AC susceptibility and DC moment of a sample |
John K. Krause, Bradley C. Dodrill |
1994-05-10 |
| 4563587 |
Focused ion beam microfabrication column |
J. William Ward, Richard P. Vahrenkamp, Robert L. Seliger |
1986-01-07 |
| 4431923 |
Alignment process using serial detection of repetitively patterned alignment marks |
Robert L. Seliger |
1984-02-14 |
| 4367429 |
Alloys for liquid metal ion sources |
Joseph A. Wysocki, Gregory L. Tangonan, Robert L. Seliger |
1983-01-04 |
| 4327292 |
Alignment process using serial detection of repetitively patterned alignment marks |
Robert L. Seliger |
1982-04-27 |
| 4233571 |
Laser having a nonlinear phase conjugating reflector |
Amnon Yariv |
1980-11-11 |
