Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9103555 | Multiple zone climate control system | Shazhou Zou, Jian Mao, Tianxin Wang | 2015-08-11 |
| 9028646 | Film adhesive for semiconductor vacuum processing apparatus | Dean J. Larson, Tom Stevenson | 2015-05-12 |
| 8701268 | Composite showerhead electrode assembly for a plasma processing apparatus | Dean J. Larson, Tom Stevenson | 2014-04-22 |
| 8579182 | Method for providing an inerting gas during soldering | Chun Christine Dong, Jerry Wu, Ranajit Ghosh, Gregory Khosrov Arslanian | 2013-11-12 |
| 8449786 | Film adhesive for semiconductor vacuum processing apparatus | Dean J. Larson, Tom Stevenson | 2013-05-28 |
| 8418649 | Composite showerhead electrode assembly for a plasma processing apparatus | Dean J. Larson, Tom Stevenson | 2013-04-16 |
| 8220699 | Apparatus and method for providing an inerting gas during soldering | Chun Christine Dong, Gregory Khosrov Arsianian, Ranajit Ghosh, Jerry Wu | 2012-07-17 |
| 8084705 | Quartz guard ring centering features | Dean J. Larson, Daniel Arthur Brown, Keith Comendant | 2011-12-27 |
| 7875824 | Quartz guard ring centering features | Dean J. Larson, Daniel Arthur Brown, Keith Comendant | 2011-01-25 |
| 7832465 | Affordable and easy to install multi-zone HVAC system | Shazhou Zou, Jian Mao, Tianxin Wang | 2010-11-16 |
| 6843882 | Gas flow control in a wafer processing system having multiple chambers for performing same process | Karthik Janakiraman, Vikash Banthia, Teresa Winson, Nitin K. Ingle | 2005-01-18 |
| 5506500 | Magnetic property characterization system employing a single sensing coil arrangement to measure both AC susceptibility and DC magnetization | John K. Krause, Bradley C. Dodrill | 1996-04-09 |
| 5311125 | Magnetic property characterization system employing a single sensing coil arrangement to measure AC susceptibility and DC moment of a sample | John K. Krause, Bradley C. Dodrill | 1994-05-10 |
| 4563587 | Focused ion beam microfabrication column | J. William Ward, Richard P. Vahrenkamp, Robert L. Seliger | 1986-01-07 |
| 4431923 | Alignment process using serial detection of repetitively patterned alignment marks | Robert L. Seliger | 1984-02-14 |
| 4367429 | Alloys for liquid metal ion sources | Joseph A. Wysocki, Gregory L. Tangonan, Robert L. Seliger | 1983-01-04 |
| 4327292 | Alignment process using serial detection of repetitively patterned alignment marks | Robert L. Seliger | 1982-04-27 |
| 4233571 | Laser having a nonlinear phase conjugating reflector | Amnon Yariv | 1980-11-11 |