Issued Patents All Time
Showing 1–25 of 69 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365986 | Remote capacitively coupled plasma deposition of amorphous silicon | Zubin Huang, Rui Cheng, Chen-An Chen | 2025-07-22 |
| 12362181 | Methods of forming thermally stable carbon film | Eswaranand Venkatasubramanian, Rajaram Narayanan, Pramit Manna, Abhijit Basu Mallick, Jialiang Wang | 2025-07-15 |
| 12334358 | Integration processes utilizing boron-doped silicon materials | Takehito Koshizawa, Rui Cheng, Krishna Nittala, Menghui Li, Ming-Yuan Chuang +8 more | 2025-06-17 |
| 12325910 | Deposition of conformal and gap-fill amorphous silicon thin-films | Yihong Chen, Rui Cheng, Pramit Manna, Kelvin Chan, Abhijit Basu Mallick +1 more | 2025-06-10 |
| 12205818 | Boron concentration tunability in boron-silicon films | Yi Yang, Krishna Nittala, Rui Cheng, Diwakar Kedlaya, Zubin Huang +1 more | 2025-01-21 |
| 12142480 | Seam removal in high aspect ratio gap-fill | Qinghua Zhao, Rui Cheng, Ruiyun Huang, Dong-Hyung LEE, Aykut Aydin | 2024-11-12 |
| 12131913 | Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers | Krishna Nittala, Sarah Michelle Bobek, Kwangduk Douglas Lee, Ratsamee Limdulpaiboon, Dimitri Kioussis | 2024-10-29 |
| 12077852 | Metal-doped boron films | Aykut Aydin, Rui Cheng | 2024-09-03 |
| 12062567 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng, Diwakar Kedlaya, Satish Radhakrishnan, Anton Baryshnikov +3 more | 2024-08-13 |
| 12060637 | Actively cooled foreline trap to reduce throttle valve drift | Gaosheng Fu, Tuan Nguyen, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez | 2024-08-13 |
| 12033848 | Processes for depositing sib films | Aykut Aydin, Rui Cheng, Abhijit Basu Mallick, Takehito Koshizawa, Bo Qi | 2024-07-09 |
| 11961739 | Boron concentration tunability in boron-silicon films | Yi Yang, Krishna Nittala, Rui Cheng, Diwakar Kedlaya, Zubin Huang +1 more | 2024-04-16 |
| 11939675 | Apparatus and methods for improving thermal chemical vapor deposition (CVD) uniformity | Rui Cheng, Zubin Huang | 2024-03-26 |
| 11939674 | Methods to reduce material surface roughness | Yi Yang, Krishna Nittala, Aykut Aydin, Diwakar Kedlaya | 2024-03-26 |
| 11827514 | Amorphous silicon-based films resistant to crystallization | Aykut Aydin, Krishna Nittala, Yi Yang, Gautam K. Hemani | 2023-11-28 |
| 11830706 | Heated pedestal design for improved heat transfer and temperature uniformity | Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Satish Radhakrishnan, Rui Cheng +7 more | 2023-11-28 |
| 11817320 | CVD based oxide-metal multi structure for 3D NAND memory devices | Susmit Singha Roy, Kelvin Chan, Hien Minh Le, Sanjay Kamath, Abhijit Basu Mallick +1 more | 2023-11-14 |
| 11798820 | Gas delivery systems and methods | Diwakar Kedlaya, Fang Ruan, Zubin Huang, Ganesh Balasubramanian, Kaushik Alayavalli +3 more | 2023-10-24 |
| 11791136 | Deposition radial and edge profile tunability through independent control of TEOS flow | Sanjeev Baluja, Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Joseph AuBuchon +1 more | 2023-10-17 |
| 11699585 | Methods of forming hardmasks | Jui-Yuan Hsu, Pramit Manna, Bhaskar Kumar | 2023-07-11 |
| 11699577 | Treatment for high-temperature cleans | Sarah Michelle Bobek, Ruiyun Huang, Abdul Aziz Khaja, Amit Kumar BANSAL, Dong-Hyung LEE +6 more | 2023-07-11 |
| 11694902 | Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers | Krishna Nittala, Sarah Michelle Bobek, Kwangduk Douglas Lee, Ratsamee Limdulpaiboon, Dimitri Kioussis | 2023-07-04 |
| 11676813 | Doping semiconductor films | Aykut Aydin, Rui Cheng, Yi Yang, Krishna Nittala, Bo Qi +1 more | 2023-06-13 |
| 11664226 | Methods for producing high-density carbon films for hardmasks and other patterning applications | Jui-Yuan Hsu, Pramit Manna | 2023-05-30 |
| 11664214 | Methods for producing high-density, nitrogen-doped carbon films for hardmasks and other patterning applications | Jui-Yuan Hsu, Pramit Manna | 2023-05-30 |