Issued Patents All Time
Showing 51–69 of 69 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9889567 | Wafer swapper | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Hari Ponnekanti, Sanjeev Baluja, Prajeeth Wilton | 2018-02-13 |
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Ganesh Balasubramanian, Amit Kumar BANSAL, Eller Y. Juco, Mohamad A. Ayoub, Hyung Joon Kim +11 more | 2016-05-10 |
| 9206511 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Dale R. Du Bois, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Thomas Nowak +2 more | 2015-12-08 |
| 9034143 | Inductive/capacitive hybrid plasma source and system with such chamber | Young-Kyu Cho, Kenneth Tan, Judy H. Huang | 2015-05-19 |
| 8677929 | Method and apparatus for masking solar cell substrates for deposition | Alexander Berger, Terry Bluck, Vinay Shah, Judy H. Huang, Chau Nguyen +1 more | 2014-03-25 |
| 8591699 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Dale R. Du Bois, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Thomas Nowak +2 more | 2013-11-26 |
| 8282734 | Methods to improve the in-film defectivity of PECVD amorphous carbon films | Deenesh Padhi, Chiu Chan, Sudha Rathi, Ganesh Balasubramanian, Jianhua Zhou +4 more | 2012-10-09 |
| 8197636 | Systems for plasma enhanced chemical vapor deposition and bevel edge etching | Ashish Shah, Dale R. DuBois, Ganesh Balasubramanian, Mark Fodor, Eui Kyoon Kim +7 more | 2012-06-12 |
| 8097082 | Nonplanar faceplate for a plasma processing chamber | Jianhua Zhou, Deenesh Padhi, Hang Yu, Siu F. Cheng, Yoganand Saripalli +1 more | 2012-01-17 |
| 7922440 | Apparatus and method for centering a substrate in a process chamber | Dale R. Du Bois, Ganesh Balasubramanian, Mark Fodor, Chiu Chan | 2011-04-12 |
| 7867578 | Method for depositing an amorphous carbon film with improved density and step coverage | Deenesh Padhi, Hyoung-Chan Ha, Sudha Rathi, Derek R. Witty, Chiu Chan +6 more | 2011-01-11 |
| 7699935 | Method and system for supplying a cleaning gas into a process chamber | Ramprakash Sankarakrishnan, Dale R. DuBois, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Thomas Nowak +2 more | 2010-04-20 |
| 7514125 | Methods to improve the in-film defectivity of PECVD amorphous carbon films | Deenesh Padhi, Chiu Chan, Sudha Rathi, Ganesh Balasubramanian, Jianhua Zhou +4 more | 2009-04-07 |
| 7452827 | Gas distribution showerhead featuring exhaust apertures | Steven Gianoulakis | 2008-11-18 |
| 7037376 | Backflush chamber clean | Keith Harvey, Kirby H. Floyd | 2006-05-02 |
| 6843882 | Gas flow control in a wafer processing system having multiple chambers for performing same process | Victor Wang, Vikash Banthia, Teresa Winson, Nitin K. Ingle | 2005-01-18 |
| 6830624 | Blocker plate by-pass for remote plasma clean | Edwin C. Suarez | 2004-12-14 |
| 6793733 | Gas distribution showerhead | Nitin K. Ingle, Zheng Yuan, Steven Gianoulakis | 2004-09-21 |
| 6387207 | Integration of remote plasma generator with semiconductor processing chamber | Kelly Fong, Chen-An Chen, Paul Le, Rong Pan, Shankar Venkataraman | 2002-05-14 |