Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387207 | Integration of remote plasma generator with semiconductor processing chamber | Karthik Janakiraman, Kelly Fong, Chen-An Chen, Rong Pan, Shankar Venkataraman | 2002-05-14 |
| 6161877 | Conduit interlock assembly | Phong Pham, Larry Joseph Meehan, Long Nguyen | 2000-12-19 |