Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8469368 | Edge rings for electrostatic chucks | Ian Kenworthy, Michael C. Kellogg | 2013-06-25 |
| 8282987 | Aluminum-plated components of semiconductor material and methods of manufacturing the components | Ian Kenworthy, Leonard J. Sharpless | 2012-10-09 |
| 8128750 | Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components | Ian Kenworthy, Leonard J. Sharpless | 2012-03-06 |
| 6506994 | Low profile thick film heaters in multi-slot bake chamber | Yen-Kun Wang, Mark Fodor, Chen-An Chen, Himanshu Pokharna, Son T. Nguyen +1 more | 2003-01-14 |
| 6387207 | Integration of remote plasma generator with semiconductor processing chamber | Karthik Janakiraman, Chen-An Chen, Paul Le, Rong Pan, Shankar Venkataraman | 2002-05-14 |