Issued Patents All Time
Showing 25 most recent of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100575 | Plasma processing devices having multi-port valve assemblies | Daniel Arthur Brown, Leonard J. Sharpless, Allan K. Ronne, James E. Tappan | 2024-09-24 |
| 11764086 | Wafer transport assembly with integrated buffers | David Trussell, John Daugherty, Christopher Pena, Klay Kunkel, Richard H. Gould | 2023-09-19 |
| 11393705 | Wafer transport assembly with integrated buffers | John Daugherty, David Trussell, Christopher Pena, Richard H. Gould, Klay Kunkel | 2022-07-19 |
| 11227749 | 3D printed plasma arrestor for an electrostatic chuck | — | 2022-01-18 |
| 11195706 | Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators | Alexei Marakhtanov, Felix Kozakevich, John Holland, Zhigang Chen, Kenneth Lucchesi +1 more | 2021-12-07 |
| 10914003 | Monolithic gas distribution manifold and various construction techniques and use cases therefor | Andrew C. Lee, Christopher Pena, John Daugherty | 2021-02-09 |
| 10825656 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Alexei Marakhtanov, John Holland, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2020-11-03 |
| 10790174 | Wafer transport assembly with integrated buffers | John Daugherty, David Trussell, Christopher Pena, Richard H. Gould, Klay Kunkel | 2020-09-29 |
| 10665435 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2020-05-26 |
| 10615003 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Alexei Marakhtanov, John Holland, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2020-04-07 |
| 10557197 | Monolithic gas distribution manifold and various construction techniques and use cases therefor | Andrew C. Lee, Christopher Pena, John Daugherty | 2020-02-11 |
| 10395902 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2019-08-27 |
| 10283330 | Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators | Alexei Marakhtanov, Felix Kozakevich, John Holland, Zhigang Chen, Kenneth Lucchesi +1 more | 2019-05-07 |
| 10118263 | Monolithic manifold mask and substrate concepts | Andrew C. Lee, Christopher Pena | 2018-11-06 |
| 10115568 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Alexei Marakhtanov, John Holland, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2018-10-30 |
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2018-08-14 |
| 10037869 | Plasma processing devices having multi-port valve assemblies | Daniel Arthur Brown, Leonard J. Sharpless, Allan K. Ronne, James E. Tappan | 2018-07-31 |
| 10014196 | Wafer transport assembly with integrated buffers | John Daugherty, David Trussell, Christopher Pena, Richard H. Gould, Klay Kunkel | 2018-07-03 |
| 9929028 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | David Trussell, John Daugherty, Christopher Pena, Richard H. Gould, Klay Kunkel | 2018-03-27 |
| 9852889 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Alexei Marakhtanov, John Holland, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2017-12-26 |
| 9502275 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | David Trussell, John Daugherty, Christopher Pena, Richard H. Gould, Klay Kunkel | 2016-11-22 |
| 9171702 | Consumable isolation ring for movable substrate support assembly of a plasma processing chamber | Alexei Marakhtanov, Rajinder Dhindsa | 2015-10-27 |
| 9123661 | Silicon containing confinement ring for plasma processing apparatus and method of forming thereof | — | 2015-09-01 |
| 9111731 | Gas feed insert in a plasma processing chamber and methods therefor | Anthony de la Llera, Alexei Marakhtanov, Rajinder Dhindsa | 2015-08-18 |
| 8975817 | Pressure controlled heat pipe temperature control plate | Rajinder Dhindsa, Tom Stevenson | 2015-03-10 |