Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8900398 | Local plasma confinement and pressure control arrangement and methods thereof | Rajinder Dhindsa, Babak Kadkhodayan, Andrew D. Bailey, III | 2014-12-02 |
| 8845856 | Edge ring assembly for plasma etching chambers | Michael Kang, Miguel Saldana, Travis R. Taylor | 2014-09-30 |
| 8847495 | Movable grounding arrangements in a plasma processing chamber and methods therefor | Anthony de la Llera, Alexei Marakhtanov, Rajinder Dhindsa | 2014-09-30 |
| 8826855 | C-shaped confinement ring for a plasma processing chamber | Alexei Marakhtanov, Rajinder Dhindsa | 2014-09-09 |
| 8796153 | Clamped monolithic showerhead electrode | Roger Patrick, Gregory R. Bettencourt | 2014-08-05 |
| 8628268 | Cam lock electrode clamp | Anthony J. Norell, Anthony de la Llera, Rajinder Dhindsa | 2014-01-14 |
| 8573152 | Showerhead electrode | Anthony de la Llera, Pratik Mankidy, Rajinder Dhindsa | 2013-11-05 |
| 8485128 | Movable ground ring for a plasma processing chamber | Alexei Marakhtanov, Rajinder Dhindsa | 2013-07-16 |
| 8469368 | Edge rings for electrostatic chucks | Ian Kenworthy, Kelly Fong | 2013-06-25 |
| 8470127 | Cam-locked showerhead electrode and assembly | Anthony de la Llera, Pratik Mankidy, Rajlnder Dhindsa, Gregory R. Bettencourt, Roger Patrick | 2013-06-25 |
| 8414719 | Clamped monolithic showerhead electrode | Roger Patrick, Gregory R. Bettencourt | 2013-04-09 |
| 8313805 | Clamped showerhead electrode assembly | Babak Kadkhodayan, Rajinder Dhindsa, Anthony de la Llera | 2012-11-20 |
| 8221582 | Clamped monolithic showerhead electrode | Roger Patrick, Gregory R. Bettencourt | 2012-07-17 |
| 8206506 | Showerhead electrode | Babak Kadkhodayan, Rajinder Dhindsa, Anthony de la Llera | 2012-06-26 |
| 8161906 | Clamped showerhead electrode assembly | Babak Kadkhodayan, Rajinder Dhindsa, Anthony de la Llera | 2012-04-24 |