| 12198896 |
Compact high density plasma source |
Neil Benjamin, Lee Chen, Alan M. Schoepp, Clint Thomas, Thomas W. Anderson +1 more |
2025-01-14 |
|
| 9927798 |
Mobile connectivity and control of semiconductor manufacturing equipment |
Chung-Ho Huang, Simon Gosselin, Vincent Wong, Ronald Ramnarine, Neal Newton +4 more |
2018-03-27 |
$44,712,000 |
| 9541514 |
Method and apparatus for diagnosing status of parts in real time in plasma processing equipment |
— |
2017-01-10 |
|
| 9279758 |
Method and apparatus for diagnosing status of parts in real time in plasma processing equipment |
— |
2016-03-08 |
$23,224,000 |
| 8796153 |
Clamped monolithic showerhead electrode |
Gregory R. Bettencourt, Michael C. Kellogg |
2014-08-05 |
$14,554,000 |
| 8470127 |
Cam-locked showerhead electrode and assembly |
Anthony de la Llera, Pratik Mankidy, Rajlnder Dhindsa, Michael C. Kellogg, Gregory R. Bettencourt |
2013-06-25 |
$6,954,000 |
| 8414719 |
Clamped monolithic showerhead electrode |
Gregory R. Bettencourt, Michael C. Kellogg |
2013-04-09 |
$17,220,000 |
| 8343305 |
Method and apparatus for diagnosing status of parts in real time in plasma processing equipment |
— |
2013-01-01 |
|
| 8268117 |
Showerhead electrodes |
Greg Bettencourt, Raj Dhindsa, George Diercks, Randall A. Hardin, Jon Keihl +4 more |
2012-09-18 |
$6,471,000 |
| 8221582 |
Clamped monolithic showerhead electrode |
Gregory R. Bettencourt, Michael C. Kellogg |
2012-07-17 |
$6,659,000 |
| 8216418 |
Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings |
Raj Dhindsa, Greg Bettencourt, Alexei Marakhtanov |
2012-07-10 |
$6,477,000 |
| 8187413 |
Electrode assembly and plasma processing chamber utilizing thermally conductive gasket |
Raj Dhindsa, Greg Bettencourt, Alexei Marakhtanov |
2012-05-29 |
$6,894,000 |
| 8152954 |
Showerhead electrode assemblies and plasma processing chambers incorporating the same |
Greg Bettencourt, Raj Dhindsa, George Diercks, Randall A. Hardin, Jon Keihl +4 more |
2012-04-10 |
$11,339,000 |
| 7228257 |
Architecture for general purpose programmable semiconductor processing system and methods therefor |
Vincent Wong, Chung-Ho Huang |
2007-06-05 |
$15,368,000 |
| 7190119 |
Methods and apparatus for optimizing a substrate in a plasma processing system |
Brett C. Richardson, Norman Williams |
2007-03-13 |
$61,938,000 |
| 6309979 |
Methods for reducing plasma-induced charging damage |
Stanley C. Siu, Luisarita Atzei |
2001-10-30 |
$45,445,000 |
| 6174450 |
Methods and apparatus for controlling ion energy and plasma density in a plasma processing system |
Norman Williams |
2001-01-16 |
$55,171,000 |
| 6062163 |
Plasma initiating assembly |
Philippe Schoenborn, Mark Franklin, Frank Bose |
2000-05-16 |
$22,185,000 |
| 5904571 |
Methods and apparatus for reducing charging during plasma processing |
Phillip Jones, Kambiz Fallahpour, Yun-Yen Jack Yang, Wen-Ben Chou |
1999-05-18 |
$6,374,000 |
| 5869877 |
Methods and apparatus for detecting pattern dependent charging on a workpiece in a plasma processing system |
Phillip Jones |
1999-02-09 |
$8,835,000 |
| 5639519 |
Method for igniting low pressure inductively coupled plasma |
Philippe Schoenborn, Mark Franklin, Frank Bose |
1997-06-17 |
$9,146,000 |
| 5578165 |
Coil configurations for improved uniformity in inductively coupled plasma systems |
Frank Bose, Philippe Schoenborn, Harry Toda |
1996-11-26 |
$19,413,000 |
| 5556549 |
Power control and delivery in plasma processing equipment |
Frank Bose |
1996-09-17 |
$9,557,000 |
| 5532516 |
Techniques for via formation and filling |
Nicholas F. Pasch |
1996-07-02 |
$17,018,000 |
| 5474648 |
Uniform and repeatable plasma processing |
Frank Bose, Philippe Schoenborn |
1995-12-12 |
$28,299,000 |
