Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Showerhead electrode assemblies and plasma processing chambers incorporating the same

Showerhead electrode assemblies and plasma processing chambers incorporating the same

US Patent 8152954 · Granted Apr 10, 2012

Estimated economic value: $11,339,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Radiofrequency signal filter arrangement for plasma processing system2025
Methods and systems for managing byproduct material accumulation during plasma-b2025
Low frequency RF generator and associated electrostatic chuck2025
Systems and methods for controlling a plasma sheath characteristic2025
Systems and methods for optimizing power delivery to an electrode of a plasma ch2025
Electrostatic edge ring mounting system for substrate processing2025
Systems and methods for use of low frequency harmonics in bias radiofrequency su2025
Systems and methods for using binning to increase power during a low frequency c2025
Process control for ion energy delivery using multiple generators and phase cont2025
Compact high density plasma source2025
Tuning voltage setpoint in a pulsed RF signal for a tunable edge sheath system2024
Uniformity control circuit for impedance match2024