Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9023177 | Anchoring inserts, electrode assemblies, and plasma processing chambers | Jonathan J. Keihl, Duane Lytle | 2015-05-05 |
| 8268117 | Showerhead electrodes | Greg Bettencourt, Raj Dhindsa, George Diercks, Jon Keihl, Duane Lytle +4 more | 2012-09-18 |
| 8187414 | Anchoring inserts, electrode assemblies, and plasma processing chambers | John Keihl, Duane Lytle | 2012-05-29 |
| 8152954 | Showerhead electrode assemblies and plasma processing chambers incorporating the same | Greg Bettencourt, Raj Dhindsa, George Diercks, Jon Keihl, Duane Lytle +4 more | 2012-04-10 |
| 8043470 | Electrode/probe assemblies and plasma processing chambers incorporating the same | Jon Keihl, Shannon Spencer | 2011-10-25 |