Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8268117 | Showerhead electrodes | Raj Dhindsa, George Diercks, Randall A. Hardin, Jon Keihl, Duane Lytle +4 more | 2012-09-18 |
| 8216418 | Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings | Roger Patrick, Raj Dhindsa, Alexei Marakhtanov | 2012-07-10 |
| 8187413 | Electrode assembly and plasma processing chamber utilizing thermally conductive gasket | Roger Patrick, Raj Dhindsa, Alexei Marakhtanov | 2012-05-29 |
| 8152954 | Showerhead electrode assemblies and plasma processing chambers incorporating the same | Raj Dhindsa, George Diercks, Randall A. Hardin, Jon Keihl, Duane Lytle +4 more | 2012-04-10 |