Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9023177 | Anchoring inserts, electrode assemblies, and plasma processing chambers | Randall A. Hardin, Jonathan J. Keihl | 2015-05-05 |
| 8268117 | Showerhead electrodes | Greg Bettencourt, Raj Dhindsa, George Diercks, Randall A. Hardin, Jon Keihl +4 more | 2012-09-18 |
| 8187414 | Anchoring inserts, electrode assemblies, and plasma processing chambers | Randall A. Hardin, John Keihl | 2012-05-29 |
| 8152954 | Showerhead electrode assemblies and plasma processing chambers incorporating the same | Greg Bettencourt, Raj Dhindsa, George Diercks, Randall A. Hardin, Jon Keihl +4 more | 2012-04-10 |