Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8268117 | Showerhead electrodes | Greg Bettencourt, Raj Dhindsa, George Diercks, Randall A. Hardin, Jon Keihl +4 more | 2012-09-18 |
| 8152954 | Showerhead electrode assemblies and plasma processing chambers incorporating the same | Greg Bettencourt, Raj Dhindsa, George Diercks, Randall A. Hardin, Jon Keihl +4 more | 2012-04-10 |
| 8043470 | Electrode/probe assemblies and plasma processing chambers incorporating the same | Randall A. Hardin, Jon Keihl | 2011-10-25 |