Low frequency RF generator and associated electrostatic chuck

Assignee

• Lam Research

Inventors

• Alexei Marakhtanov (100 patents)
• Felix Kozakevich (58 patents)
• Bing Ji (26 patents)
• Ranadeep Bhowmick (17 patents)
• John Holland (130 patents)
• Alexander Matyushkin (23 patents)

View full patent text on Google Patents →