Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Process control for ion energy delivery using multiple generators and phase control

Process control for ion energy delivery using multiple generators and phase control

US Patent 12255052 · Granted Mar 18, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Tunability of edge plasma density for tilt control2025
High aspect ratio dielectric etch with chlorine2025
Selective attachment to enhance SiO2:SiNx etch selectivity2025
Radiofrequency signal filter arrangement for plasma processing system2025
Radiofrequency signal filter arrangement for plasma processing system2025
Radiofrequency signal filter arrangement for plasma processing system2025
Radiofrequency signal filter arrangement for plasma processing system2025
High density, modulus, and hardness amorphous carbon films at low pressure2025
Methods and systems for managing byproduct material accumulation during plasma-b2025
Methods and systems for managing byproduct material accumulation during plasma-b2025
Methods and systems for managing byproduct material accumulation during plasma-b2025
Profile optimization for high aspect ratio memory using an etch front metal cata2025