Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5471091 | Techniques for via formation and filling | Nicholas F. Pasch | 1995-11-28 |
| 5468296 | Apparatus for igniting low pressure inductively coupled plasma | Philippe Schoenborn, Mark Franklin, Frank Bose | 1995-11-21 |
| 5407524 | End-point detection in plasma etching by monitoring radio frequency matching network | Frank Bose | 1995-04-18 |
| 5401350 | Coil configurations for improved uniformity in inductively coupled plasma systems | Frank Bose, Philippe Schoenborn, Harry Toda | 1995-03-28 |
| 5354706 | Formation of uniform dimension conductive lines on a semiconductor wafer | — | 1994-10-11 |
| 5217566 | Densifying and polishing glass layers | Nicholas F. Pasch | 1993-06-08 |
| 4879257 | Planarization process | — | 1989-11-07 |