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Objective |
Stephan SMOLKA, Manuel Aschwanden |
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Tunable prism for optical image stabilization |
Mark Ventura, David Leuenberger, Michael Büeler, Manuel Aschwanden, Stephan SMOLKA +1 more |
2024-06-18 |
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Method and apparatus for controlling slurry delivery during polishing |
Fred C. Redeker, Rajeev Bajaj, A. Jason Whitby |
2003-10-07 |
| 6241593 |
Carrier head with pressurizable bladder |
Hung Chih Chen, Steven M. Zuniga |
2001-06-05 |
| 6062163 |
Plasma initiating assembly |
Roger Patrick, Philippe Schoenborn, Mark Franklin |
2000-05-16 |
| 5639519 |
Method for igniting low pressure inductively coupled plasma |
Roger Patrick, Philippe Schoenborn, Mark Franklin |
1997-06-17 |
| 5578165 |
Coil configurations for improved uniformity in inductively coupled plasma systems |
Roger Patrick, Philippe Schoenborn, Harry Toda |
1996-11-26 |
| 5556549 |
Power control and delivery in plasma processing equipment |
Roger Patrick |
1996-09-17 |
| 5474648 |
Uniform and repeatable plasma processing |
Roger Patrick, Philippe Schoenborn |
1995-12-12 |
| 5468296 |
Apparatus for igniting low pressure inductively coupled plasma |
Roger Patrick, Philippe Schoenborn, Mark Franklin |
1995-11-21 |
| 5407524 |
End-point detection in plasma etching by monitoring radio frequency matching network |
Roger Patrick |
1995-04-18 |
| 5401350 |
Coil configurations for improved uniformity in inductively coupled plasma systems |
Roger Patrick, Philippe Schoenborn, Harry Toda |
1995-03-28 |