Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5578165 | Coil configurations for improved uniformity in inductively coupled plasma systems | Roger Patrick, Frank Bose, Philippe Schoenborn | 1996-11-26 |
| 5401350 | Coil configurations for improved uniformity in inductively coupled plasma systems | Roger Patrick, Frank Bose, Philippe Schoenborn | 1995-03-28 |