Issued Patents All Time
Showing 25 most recent of 174 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11996375 | Integrated circuit structure, and method for forming thereof | Yi-Chao Mao, Chin-Chuan Chang, Szu-Wei Lu, Kun-Tong Tsai | 2024-05-28 |
| 11850703 | Method of forming retaining ring with shaped surface | Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2023-12-26 |
| 11616034 | Integrated circuit structure, and method for forming thereof | Yi-Chao Mao, Chin-Chuan Chang, Szu-Wei Lu, Kun-Tong Tsai | 2023-03-28 |
| 11577361 | Retaining ring with shaped surface and method of forming | Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2023-02-14 |
| 11453097 | Chemical mechanical polishing apparatus and methods | Rajeev Bajaj, Thomas H. Osterheld, Terrance Y. Lee | 2022-09-27 |
| 11260500 | Retaining ring with shaped surface | Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2022-03-01 |
| 11173579 | Inner retaining ring and outer retaining ring for carrier head | Mario David Silvetti, Yin Yuan, Samuel Chu-Chiang Hsu, Huanbo Zhang, Gautam Shashank Dandavate | 2021-11-16 |
| 11072049 | Polishing pad having arc-shaped configuration | — | 2021-07-27 |
| 10766117 | Retaining ring with shaped surface | Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2020-09-08 |
| 10702971 | Textured membrane for a multi-chamber carrier head | Jeonghoon Oh, Tsz-Sin Siu, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky | 2020-07-07 |
| 10602362 | Gateway, gateway setup method, and IoT device setup method in IoT system | Tzu-Hao Tsao, KAI-HO HSIUNG | 2020-03-24 |
| 10500694 | Chemical mechanical polishing apparatus and methods | Rajeev Bajaj, Thomas H. Osterheld, Terrance Y. Lee | 2019-12-10 |
| 10226853 | Methods and apparatus for conditioning of chemical mechanical polishing pads | Rajeev Bajaj | 2019-03-12 |
| 10207389 | Polishing pad configuration and chemical mechanical polishing system | — | 2019-02-19 |
| 10105812 | Polishing pad configuration and polishing pad support | — | 2018-10-23 |
| 10076817 | Orbital polishing with small pad | Paul D. Butterfield, Jay Gurusamy, Jason Garcheung Fung, Shou-Sung Chang, Jimin Zhang +1 more | 2018-09-18 |
| 10022837 | Inner retaining ring and outer retaining ring for carrier head | Yin Yuan, Samuel Chu-Chiang Hsu, Huanbo Zhang, Gautam Shashank Dandavate | 2018-07-17 |
| 9987724 | Polishing system with pad carrier and conditioning station | Jay Gurusamy | 2018-06-05 |
| 9937601 | Retaining ring with Shaped Surface | Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2018-04-10 |
| 9873179 | Carrier for small pad for chemical mechanical polishing | Hui Chen, Steven M. Zuniga, Eric Lau, Garrett H. Sin, Shou-Sung Chang | 2018-01-23 |
| 9862070 | Systems and methods for substrate polishing end point detection using improved friction measurement | Shou-Sung Chang, Lakshmanan Karuppiah, Paul D. Butterfield, Erik S. Rondum | 2018-01-09 |
| 9808906 | Polishing system with front side pressure control | Shou-Sung Chang, Takashi Fujikawa, Paul D. Butterfield | 2017-11-07 |
| 9662762 | Modifying substrate thickness profiles | Jay Gurusamy | 2017-05-30 |
| 9625951 | Supporting base and computer system | Chen-Yi Liang, Chun-Chien Chen | 2017-04-18 |
| 9529390 | Computer apparatus | Tien-Chung Tseng, Chen-Yi Liang | 2016-12-27 |