Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12048981 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast +1 more | 2024-07-30 |
| 12033865 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu | 2024-07-09 |
| 11682561 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu | 2023-06-20 |
| 11453099 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast +1 more | 2022-09-27 |
| 11173579 | Inner retaining ring and outer retaining ring for carrier head | Hung Chih Chen, Mario David Silvetti, Yin Yuan, Samuel Chu-Chiang Hsu, Huanbo Zhang | 2021-11-16 |
| 11056350 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu | 2021-07-06 |
| 10500695 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast +1 more | 2019-12-10 |
| 10022837 | Inner retaining ring and outer retaining ring for carrier head | Hung Chih Chen, Yin Yuan, Samuel Chu-Chiang Hsu, Huanbo Zhang | 2018-07-17 |
| 9610672 | Configurable pressure design for multizone chemical mechanical planarization polishing head | Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu | 2017-04-04 |
| 9492905 | Retaining ring with selected stiffness and thickness | Hung Chih Chen, Samuel Chu-Chiang Hsu | 2016-11-15 |
| 9368371 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu | 2016-06-14 |
| 9067295 | Monitoring retaining ring thickness and pressure control | Sameer Deshpande, Zhihong Wang, Samuel Chu-Chiang Hsu, Hung Chih Chen, Wen-Chiang Tu | 2015-06-30 |
| 9050699 | Polishing head zone boundary smoothing | Hung Chih Chen, Samuel Chu-Chiang Hsu, Denis M. Koosau | 2015-06-09 |
| 9050700 | Methods and apparatus for an improved polishing head retaining ring | Hung Chih Chen, Jay Gurusamy, Samuel Chu-Chiang Hsu | 2015-06-09 |
| 8998676 | Retaining ring with selected stiffness and thickness | Hung Chih Chen, Samuel Chu-Chiang Hsu | 2015-04-07 |
| 8840446 | Inner retaining ring and outer retaining ring for carrier head | Hung Chih Chen, Samuel Chu-Chiang Hsu, Yin Yuan, Huanbo Zhang | 2014-09-23 |
| 8721391 | Carrier head with narrow inner ring and wide outer ring | Hung Chih Chen, Samuel Chu-Chiang Hsu, Yin Yuan, Huanbo Zhang | 2014-05-13 |
| 8591286 | Apparatus and method for temperature control during polishing | Hung Chih Chen, Samuel Chu-Chiang Hsu, Denis M. Koosau | 2013-11-26 |
| 8460067 | Polishing head zone boundary smoothing | Hung Chih Chen, Samuel Chu-Chiang Hsu, Denis M. Koosau | 2013-06-11 |