Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10741459 | Inductive monitoring of conductive loops | Wei Lu, Zhefu Wang, Zhihong Wang, Hassan G. Iravani, Dominic J. Benvegnu +2 more | 2020-08-11 |
| 10589397 | Endpoint control of multiple substrate zones of varying thickness in chemical mechanical polishing | Alain Duboust, Shih-Haur Shen, Jimin Zhang, Ingemar Carlsson, Boguslaw A. Swedek +4 more | 2020-03-17 |
| 10556315 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett +2 more | 2020-02-11 |
| 10464184 | Modifying substrate thickness profiles | Jimin Zhang, Zhihong Wang | 2019-11-05 |
| 10207386 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett +2 more | 2019-02-19 |
| 10199281 | Substrate features for inductive monitoring of conductive trench depth | Wei Lu, Zhihong Wang, Zhefu Wang, Hassan G. Iravani, Boguslaw A. Swedek +2 more | 2019-02-05 |
| 10103073 | Inductive monitoring of conductive trench depth | Wei Lu, Zhefu Wang, Zhihong Wang, Hassan G. Iravani, Dominic J. Benvegnu +2 more | 2018-10-16 |
| 9911664 | Substrate features for inductive monitoring of conductive trench depth | Wei Lu, Zhihong Wang, Zhefu Wang, Hassan G. Iravani, Boguslaw A. Swedek +2 more | 2018-03-06 |
| 9754846 | Inductive monitoring of conductive trench depth | Wei Lu, Zhefu Wang, Zhihong Wang, Hassan G. Iravani, Dominic J. Benvegnu +2 more | 2017-09-05 |
| 9636797 | Adjusting eddy current measurements | Kun Xu, Ingemar Carlsson, Boguslaw A. Swedek, Doyle E. Bennett, Shih-Haur Shen +2 more | 2017-05-02 |
| 9496190 | Feedback of layer thickness timing and clearance timing for polishing control | Kun Xu, Feng Q. Liu, Dominic J. Benvegnu, Boguslaw A. Swedek, Yuchun Wang +1 more | 2016-11-15 |
| 9472475 | Feedback control using detection of clearance and adjustment for uniform topography | Kun Xu, Ingemar Carlsson, Tzu-Yu Liu, Shih-Haur Shen, Boguslaw A. Swedek +1 more | 2016-10-18 |
| 9296084 | Polishing control using weighting with default sequence | Jimin Zhang, Zhihong Wang, Harry Q. Lee | 2016-03-29 |
| 9281253 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett +2 more | 2016-03-08 |
| 9275917 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett +2 more | 2016-03-01 |
| 9248544 | Endpoint detection during polishing using integrated differential intensity | Jimin Zhang, Harry Q. Lee, Zhihong Wang | 2016-02-02 |
| 9205527 | In-situ monitoring system with monitoring of elongated region | Kun Xu, Shih-Haur Shen, Tzu-Yu Liu, Ingemar Carlsson, Hassan G. Iravani +2 more | 2015-12-08 |
| 9186774 | X-ray metrology for control of polishing | Boguslaw A. Swedek, Dominic J. Benvegnu | 2015-11-17 |
| 9073169 | Feedback control of polishing using optical detection of clearance | Kun Xu, Ingemar Carlsson, Feng Q. Liu, David Maxwell Gage, You Wang +5 more | 2015-07-07 |
| 9067295 | Monitoring retaining ring thickness and pressure control | Sameer Deshpande, Zhihong Wang, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate, Hung Chih Chen | 2015-06-30 |
| 9023667 | High sensitivity eddy current monitoring system | Hassan G. Iravani, Kun Xu, Boguslaw A. Swedek, Ingemar Carlsson, Shih-Haur Shen | 2015-05-05 |
| 9005999 | Temperature control of chemical mechanical polishing | Kun Xu, Jimin Zhang, David H. Mai, Stephen Jew, Shih-Haur Shen +4 more | 2015-04-14 |
| 8989890 | GST film thickness monitoring | Kun Xu, Feng Q. Liu, Dominic J. Benvegnu, Boguslaw A. Swedek, Yuchun Wang +1 more | 2015-03-24 |
| 8860932 | Detection of layer clearing using spectral monitoring | Jimin Zhang, Zhihong Wang, Harry Q. Lee | 2014-10-14 |
| 8694144 | Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing | Alain Duboust, Stephen Jew, David H. Mai, Huyen Tran, Shih-Haur Shen +4 more | 2014-04-08 |