Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11911870 | Polishing pads for high temperature processing | Sivapackia Ganapathiappan, Rajeev Bajaj, Yingdong Luo, Aniruddh Jagdish Khanna, Daniel Redfield | 2024-02-27 |
| 11897079 | Low-temperature metal CMP for minimizing dishing and corrosion, and improving pad asperity | Haosheng Wu, Hari Soundararajan, Jianshe Tang, Shou-Sung Chang, Brian J. Brown +2 more | 2024-02-13 |
| 11211252 | Systems and methods for copper (I) suppression in electrochemical deposition | Eric J. Bergman, John L. Klocke | 2021-12-28 |
| 11060930 | Glass surface stress meter and multiple-tempered glass surface stress meter | Xiuxin Shang, Xudong Wang, Xiupu Wang, Fei Yan, XIANG-BIAO TANG | 2021-07-13 |
| 10786885 | Thin plastic polishing article for CMP applications | Robert D. Tolles, Gregory E. Menk, Eric Davey, Huyen Karen Tran, Fred C. Redeker +3 more | 2020-09-29 |
| 9073169 | Feedback control of polishing using optical detection of clearance | Kun Xu, Ingemar Carlsson, Feng Q. Liu, David Maxwell Gage, Dominic J. Benvegnu +5 more | 2015-07-07 |
| 8586481 | Chemical planarization of copper wafer polishing | Wen-Chiang Tu, Feng Q. Liu, Yuchun Wang, Lakshmanan Karuppiah, William H. McClintock +1 more | 2013-11-19 |
| 8210900 | Dishing and defect control of chemical mechanical polishing using real-time adjustable additive delivery | Wen-Chiang Tu, Yuchun Wang, Lakshmanan Karuppiah | 2012-07-03 |
| 7879255 | Method and composition for electrochemically polishing a conductive material on a substrate | Huyen Karen Tran, Renhe Jia, Stan Tsai, Martin S. Wohlert, Daxin Mao | 2011-02-01 |
| 7670688 | Erosion-resistant components for plasma process chambers | Tony Kaushal, Ananda H. Kumar | 2010-03-02 |
| 7582564 | Process and composition for conductive material removal by electrochemical mechanical polishing | Zhihong Wang, Daxin Mao, Renhe Jia, Stan Tsai, Yongqi Hu +2 more | 2009-09-01 |
| 7576007 | Method for electrochemically mechanically polishing a conductive material on a substrate | Zhihong Wang, Renhe Jia, Stan Tsai, Yongqi Hu | 2009-08-18 |
| 7504018 | Electrochemical method for Ecmp polishing pad conditioning | Stan Tsai, Lakshmanan Karuppiah, Jie Diao, Renhe Jia, Alpay Yilmaz | 2009-03-17 |
| 7422982 | Method and apparatus for electroprocessing a substrate with edge profile control | Jie Diao, Stan Tsai, Lakshmanan Karuppiah | 2008-09-09 |
| 7344432 | Conductive pad with ion exchange membrane for electrochemical mechanical polishing | Liang-Yun Chen, Yuchun Wang, Yan Wang, Alain Duboust, Daniel Carl +9 more | 2008-03-18 |
| 7214297 | Substrate support element for an electrochemical plating cell | Anzhong Chang, John O. Dukovic | 2007-05-08 |
| 6639783 | Multi-layer ceramic electrostatic chuck with integrated channel | Shamouil Shamouilian, Ananda H. Kumar | 2003-10-28 |
| 6583980 | Substrate support tolerant to thermal expansion stresses | Arnold Kholodenko, Shamouil Shamouilian, Alexander Veytser, Wing Cheng | 2003-06-24 |
| 6538872 | Electrostatic chuck having heater and method | Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi, Kadthala Ramaya Narendrnath +4 more | 2003-03-25 |
| 6503368 | Substrate support having bonded sections and method | Arnold Kholodenko, Vijay D. Parkhe, Shamouil Shamouilian, Wing Cheng, Alexander Veytser | 2003-01-07 |
| 6490146 | Electrostatic chuck bonded to base with a bond layer and method | Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi, Kadthala Ramaya Narendrnath +4 more | 2002-12-03 |
| 6490145 | Substrate support pedestal | Arnold Kholodenko, Tony Kaushal, Semyon L. Kats | 2002-12-03 |
| 6462928 | Electrostatic chuck having improved electrical connector and method | Shamouil Shamouilian, Surinder Bedi, Arnold Kholodenko, Alexander Veytser, Kadthala Ramaya Narendrnath +4 more | 2002-10-08 |
| 6310755 | Electrostatic chuck having gas cavity and method | Arnold Kholodenko, Shamouil Shamouilian, Wing Cheng, Alexander Veytser, Surinder Bedi +4 more | 2001-10-30 |
| 6094334 | Polymer chuck with heater and method of manufacture | Surinder Bedi, Shamouil Shamouilian, Syed H. Askari, Arnold Kholodenko, Jon Clinton +2 more | 2000-07-25 |