Thin plastic polishing article for CMP applications

Assignee

• Applied Materials

Inventors

• Robert D. Tolles (49 patents)
• Gregory E. Menk (32 patents)
• Eric Davey (2 patents)
• You Wang (26 patents)
• Huyen Karen Tran (3 patents)
• Fred C. Redeker (169 patents)
• Veera Raghava Reddy Kakireddy (8 patents)
• Ekaterina A. Mikhaylichenko (14 patents)
• Jay Gurusamy (37 patents)

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