| 12023853 |
Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles |
Kasiraman Krishnan, Daniel Redfield, Russell Edward Perry, Rajeev Bajaj, Fred C. Redeker +3 more |
2024-07-02 |
$85,126,000 |
| 11986922 |
Techniques for combining CMP process tracking data with 3D printed CMP consumables |
Jason Garcheung Fung, Rajeev Bajaj, Daniel Redfield, Aniruddh Jagdish Khanna, Mario CORNEJO +1 more |
2024-05-21 |
$57,593,000 |
| 11958162 |
CMP pad construction with composite material properties using additive manufacturing processes |
Rajeev Bajaj, Kasiraman Krishnan, Mahendra C. ORILALL, Daniel Redfield, Fred C. Redeker +4 more |
2024-04-16 |
$82,852,000 |
| 11724362 |
Polishing pads produced by an additive manufacturing process |
Rajeev Bajaj, Daniel Redfield, Mahendra C. ORILALL, Boyi Fu, Aniruddh Jagdish Khanna +5 more |
2023-08-15 |
$42,730,000 |
| 10875145 |
Polishing pads produced by an additive manufacturing process |
Rajeev Bajaj, Daniel Redfield, Mahendra C. ORILALL, Boyi Fu, Aniruddh Jagdish Khanna +12 more |
2020-12-29 |
$47,583,000 |
| 10821573 |
Polishing pads produced by an additive manufacturing process |
Rajeev Bajaj, Daniel Redfield, Mahendra C. ORILALL, Boyi Fu, Aniruddh Jagdish Khanna +12 more |
2020-11-03 |
$108,601,000 |
| 10786885 |
Thin plastic polishing article for CMP applications |
Robert D. Tolles, Eric Davey, You Wang, Huyen Karen Tran, Fred C. Redeker +3 more |
2020-09-29 |
$24,138,000 |
| 10593574 |
Techniques for combining CMP process tracking data with 3D printed CMP consumables |
Jason Garcheung Fung, Rajeev Bajaj, Daniel Redfield, Aniruddh Jagdish Khanna, Mario CORNEJO +1 more |
2020-03-17 |
$17,260,000 |
| 10537974 |
CMP pad construction with composite material properties using additive manufacturing processes |
Rajeev Bajaj, Kasiraman Krishnan, Mahendra C. ORILALL, Daniel Redfield, Fred C. Redeker +4 more |
2020-01-21 |
$34,637,000 |
| 10493691 |
Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles |
Kasiraman Krishnan, Daniel Redfield, Russell Edward Perry, Rajeev Bajaj, Fred C. Redeker +3 more |
2019-12-03 |
$22,017,000 |
| 10384330 |
Polishing pads produced by an additive manufacturing process |
Rajeev Bajaj, Daniel Redfield, Mahendra C. ORILALL, Boyi Fu, Aniruddh Jagdish Khanna +12 more |
2019-08-20 |
$26,004,000 |
| 10322491 |
Printed chemical mechanical polishing pad |
Mahendra C. ORILALL, Timothy Michaelson, Kasiraman Krishnan, Rajeev Bajaj, Nag B. Patibandla +2 more |
2019-06-18 |
$21,126,000 |
| 9873180 |
CMP pad construction with composite material properties using additive manufacturing processes |
Rajeev Bajaj, Kasiraman Krishnan, Mahendra C. ORILALL, Daniel Redfield, Fred C. Redeker +4 more |
2018-01-23 |
$41,300,000 |
| 9776361 |
Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles |
Kasiraman Krishnan, Daniel Redfield, Russell Edward Perry, Rajeev Bajaj, Fred C. Redeker +3 more |
2017-10-03 |
$36,306,000 |
| 9221147 |
Endpointing with selective spectral monitoring |
Jun Qian, Sivakumar Dhandapani, Benjamin Cherian, Thomas H. Osterheld, Jeffrey Drue David +2 more |
2015-12-29 |
$15,334,000 |
| 9177815 |
Methods for chemical mechanical planarization of patterned wafers |
Yi-Chiau Huang, Errol Antonio C. Sanchez, Bingxi Wood |
2015-11-03 |
$6,969,000 |
| 9138860 |
Closed-loop control for improved polishing pad profiles |
Sivakumar Dhandapani, Jun Qian, Christopher Cocca, Jason Garcheung Fung, Shou-Sung Chang +2 more |
2015-09-22 |
$10,938,000 |
| 8758085 |
Method for compensation of variability in chemical mechanical polishing consumables |
Sivakumar Dhandapani, Asheesh Jain, Charles C. Garretson, Stan Tsai |
2014-06-24 |
$13,917,000 |
| 8439723 |
Chemical mechanical polisher with heater and method |
Robert A. Marks, Christopher Heung-Gyun Lee, Garlen C. Leung, Jie Diao, Erik S. Rondum |
2013-05-14 |
$11,782,000 |
| 8388412 |
Retaining ring with shaped profile |
Gopalakrishna B. Prabhu, Yin Yuan, Jeonghoon Oh |
2013-03-05 |
$7,679,000 |
| 8337279 |
Closed-loop control for effective pad conditioning |
Sivakumar Dhandapani, Stan Tsai, Daxin Mao, Sameer Deshpande, Shou-Sung Chang +4 more |
2012-12-25 |
|
| 8033895 |
Retaining ring with shaped profile |
Gopalakrishna B. Prabhu, Yin Yuan, Jeonghoon Oh |
2011-10-11 |
$15,733,000 |
| 7841925 |
Polishing article with integrated window stripe |
Peter McReynolds, Erik S. Rondum, Anand N. Iyer, Gopalakrishna B. Prabhu, Garlen C. Leung |
2010-11-30 |
$5,930,000 |
| 7601050 |
Polishing apparatus with grooved subpad |
Steven M. Zuniga, Peter McReynolds, Erik S. Rondum, Benjamin A. Bonner, Henry H. Au +3 more |
2009-10-13 |
$11,309,000 |
| 7553214 |
Polishing article with integrated window stripe |
Peter McReynolds, Erik S. Rondum, Anand N. Iyer, Gopalakrishna B. Prabhu, Garlen C. Leung |
2009-06-30 |
$19,701,000 |
