Closed-loop control for effective pad conditioning

Assignee

• Applied Materials

Inventors

• Sivakumar Dhandapani (30 patents)
• Stan Tsai (81 patents)
• Daxin Mao (22 patents)
• Sameer Deshpande (20 patents)
• Shou-Sung Chang (64 patents)
• Gregory E. Menk (32 patents)
• Charles C. Garretson (38 patents)
• Jason Garcheung Fung (35 patents)
• Christopher Cocca (6 patents)
• Hung Chih Chen (174 patents)

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