Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11819976 | Spray system for slurry reduction during chemical mechanical polishing (cmp) | Chih Chung Chou, Anand N. Iyer, Ekaterina A. Mikhaylichenko, Christopher Heung-Gyun Lee, Tiffany Yu-Nung Cheung +1 more | 2023-11-21 |
| 11673226 | Retaining ring for CMP | Andrew J. Nagengast, Christopher Heung-Gyun Lee, Thomas Li, Anand N. Iyer, Jie Diao +3 more | 2023-06-13 |
| 10350728 | System and process for in situ byproduct removal and platen cooling during CMP | Jie Diao, Thomas Li, Bum Jick Kim, Christopher Heung-Gyun Lee | 2019-07-16 |
| 10322492 | Retaining ring for CMP | Andrew J. Nagengast, Christopher Heung-Gyun Lee, Thomas Li, Anand N. Iyer, Jie Diao +3 more | 2019-06-18 |
| 9862070 | Systems and methods for substrate polishing end point detection using improved friction measurement | Shou-Sung Chang, Hung Chih Chen, Lakshmanan Karuppiah, Paul D. Butterfield | 2018-01-09 |
| 9061394 | Systems and methods for substrate polishing end point detection using improved friction measurement | Shou-Sung Chang, Hung Chih Chen, Lakshmanan Karuppiah, Paul D. Butterfield | 2015-06-23 |
| 8439723 | Chemical mechanical polisher with heater and method | Robert A. Marks, Christopher Heung-Gyun Lee, Garlen C. Leung, Gregory E. Menk, Jie Diao | 2013-05-14 |
| 7841925 | Polishing article with integrated window stripe | Gregory E. Menk, Peter McReynolds, Anand N. Iyer, Gopalakrishna B. Prabhu, Garlen C. Leung | 2010-11-30 |
| 7601050 | Polishing apparatus with grooved subpad | Steven M. Zuniga, Peter McReynolds, Benjamin A. Bonner, Henry H. Au, Gregory E. Menk +3 more | 2009-10-13 |
| 7553214 | Polishing article with integrated window stripe | Gregory E. Menk, Peter McReynolds, Anand N. Iyer, Gopalakrishna B. Prabhu, Garlen C. Leung | 2009-06-30 |
| 7429210 | Materials for chemical mechanical polishing | Benjamin A. Bonner, Peter McReynolds, Gregory E. Menk, Anand N. Iyer, Gopalakrishna B. Prabhu +2 more | 2008-09-30 |
| 7179159 | Materials for chemical mechanical polishing | Benjamin A. Bonner, Peter McReynolds, Gregory E. Menk, Anand N. Iyer, Gopalakrishna B. Prabhu +2 more | 2007-02-20 |
| 6241596 | Method and apparatus for chemical mechanical polishing using a patterned pad | Thomas H. Osterheld, Hung Chih Chen | 2001-06-05 |