| 10651098 |
Polishing with measurement prior to deposition of outer layer |
Tomohiko Kitajima, Jeffrey Drue David, Jun Qian, Taketo Sekine, Sidney P. Huey |
2020-05-12 |
| 9811077 |
Polishing with pre deposition spectrum |
Tomohiko Kitajima, Jeffrey Drue David, Jun Qian, Taketo Sekine, Sidney P. Huey |
2017-11-07 |
| 9362186 |
Polishing with eddy current feed meaurement prior to deposition of conductive layer |
Tomohiko Kitajima, Jeffrey Drue David, Jun Qian, Taketo Sekine, Sidney P. Huey |
2016-06-07 |
| 8439723 |
Chemical mechanical polisher with heater and method |
Robert A. Marks, Christopher Heung-Gyun Lee, Gregory E. Menk, Jie Diao, Erik S. Rondum |
2013-05-14 |
| 8211325 |
Process sequence to achieve global planarity using a combination of fixed abrasive and high selectivity slurry for pre-metal dielectric CMP applications |
Jie Diao, Christopher Heung-Gyun Lee, Lakshmanan Karuppiah |
2012-07-03 |
| 7841925 |
Polishing article with integrated window stripe |
Gregory E. Menk, Peter McReynolds, Erik S. Rondum, Anand N. Iyer, Gopalakrishna B. Prabhu |
2010-11-30 |
| 7601050 |
Polishing apparatus with grooved subpad |
Steven M. Zuniga, Peter McReynolds, Erik S. Rondum, Benjamin A. Bonner, Henry H. Au +3 more |
2009-10-13 |
| 7553214 |
Polishing article with integrated window stripe |
Gregory E. Menk, Peter McReynolds, Erik S. Rondum, Anand N. Iyer, Gopalakrishna B. Prabhu |
2009-06-30 |
| 7429210 |
Materials for chemical mechanical polishing |
Benjamin A. Bonner, Peter McReynolds, Gregory E. Menk, Anand N. Iyer, Gopalakrishna B. Prabhu +2 more |
2008-09-30 |
| 7179159 |
Materials for chemical mechanical polishing |
Benjamin A. Bonner, Peter McReynolds, Gregory E. Menk, Anand N. Iyer, Gopalakrishna B. Prabhu +2 more |
2007-02-20 |
| 7063597 |
Polishing processes for shallow trench isolation substrates |
Gopalakrishna B. Prabhu, Thomas H. Osterheld, Adam Zhong, Peter McReynolds, Yi Tao +3 more |
2006-06-20 |
