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Use of CMP to contact a MTJ structure without forming a via |
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Method of high density field induced MRAM process |
Tom Zhong, Wai-Ming J. Kan, Daniel Liu, Chyu-Jiuh Torng |
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High density spin-transfer torque MRAM process |
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2011-02-08 |
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Method of magnetic tunneling junction pattern layout for magnetic random access memory |
Tom Zhong, Terry Kin Ting Ko, Chyu-Jiuh Torng, Wai-Ming J. Kan |
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Polishing processes for shallow trench isolation substrates |
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