Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276490 | System and method to map thickness variations of substrates in manufacturing systems | Mehdi Vaez-Iravani, Todd Egan | 2025-04-15 |
| 11768984 | Parameter sensing and computer modeling for gas delivery health monitoring | Ala Moradian, James L'HEUREUX, Shuran Sheng, Rohit Mahakali, Karthik Ramanathan +4 more | 2023-09-26 |
| 8694145 | Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles | Arulkumar Shanmugasundram, Alexander T. Schwarm | 2014-04-08 |
| 8518724 | Method to form a device by constructing a support element on a thin semiconductor lamina | Christopher J. Petti, Mohamed M. Hilali, Theodore H. Smick, Venkatesan Murali, Kathy J. Jackson +1 more | 2013-08-27 |
| 8388412 | Retaining ring with shaped profile | Yin Yuan, Jeonghoon Oh, Gregory E. Menk | 2013-03-05 |
| 8349626 | Creation of low-relief texture for a photovoltaic cell | Zhiyong Li, David Tanner, Mohamed H. Hilali | 2013-01-08 |
| 8231431 | Solar panel edge deletion module | Dhruv Gajaria, Zhiyong Li, Yacov Elgar, John Visitacion, Yong Liu +8 more | 2012-07-31 |
| 8173452 | Method to form a device by constructing a support element on a thin semiconductor lamina | Christopher J. Petti, Mohamed M. Hilali, Theodore H. Smick, Venkatesan Murali, Kathy J. Jackson +1 more | 2012-05-08 |
| 8101451 | Method to form a device including an annealed lamina and having amorphous silicon on opposing faces | Venkatesan Murali, Christopher J. Petti, Theodore H. Smick, Mohamed M. Hilali, Kathy J. Jackson +1 more | 2012-01-24 |
| 8070909 | Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles | Arulkumar Shanmugasundram, Alexander T. Schwarm | 2011-12-06 |
| 8033895 | Retaining ring with shaped profile | Yin Yuan, Jeonghoon Oh, Gregory E. Menk | 2011-10-11 |
| 7908743 | Method for forming an electrical connection | Zhiyong Li, Chuck Luu, Danny Cam Toan Lu, Garry K. Kwong, David Tanner | 2011-03-22 |
| 7841925 | Polishing article with integrated window stripe | Gregory E. Menk, Peter McReynolds, Erik S. Rondum, Anand N. Iyer, Garlen C. Leung | 2010-11-30 |
| 7601050 | Polishing apparatus with grooved subpad | Steven M. Zuniga, Peter McReynolds, Erik S. Rondum, Benjamin A. Bonner, Henry H. Au +3 more | 2009-10-13 |
| 7553214 | Polishing article with integrated window stripe | Gregory E. Menk, Peter McReynolds, Erik S. Rondum, Anand N. Iyer, Garlen C. Leung | 2009-06-30 |
| 7429210 | Materials for chemical mechanical polishing | Benjamin A. Bonner, Peter McReynolds, Gregory E. Menk, Anand N. Iyer, Erik S. Rondum +2 more | 2008-09-30 |
| 7179159 | Materials for chemical mechanical polishing | Benjamin A. Bonner, Peter McReynolds, Gregory E. Menk, Anand N. Iyer, Erik S. Rondum +2 more | 2007-02-20 |
| 7160739 | Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles | Arulkumar Shanmugasundram, Alexander T. Schwarm | 2007-01-09 |
| 7063597 | Polishing processes for shallow trench isolation substrates | Thomas H. Osterheld, Garlen C. Leung, Adam Zhong, Peter McReynolds, Yi Tao +3 more | 2006-06-20 |
| 7040966 | Carbonation of pH controlled KOH solution for improved polishing of oxide films on semiconductor wafers | Joseph F. Salfelder, Wayne R. Swart, Srinivas R. Mirmira, Laertis Economikos, Fen F. Jamin +3 more | 2006-05-09 |
| 6677239 | Methods and compositions for chemical mechanical polishing | Wei-Yung Hsu, Lizhong Sun, Daniel Carl | 2004-01-13 |
| 6592438 | CMP platen with patterned surface | Robert D. Tolles, Steven T. Mear, Sidney P. Huey, Fred C. Redeker | 2003-07-15 |
| 6575825 | CMP polishing pad | Robert D. Tolles, Steven T. Mear, Steven M. Zuniga, Hung Chih Chen | 2003-06-10 |
| 6558236 | Method and apparatus for chemical mechanical polishing | Timothy James Donohue, Declan Liam Brett, Winston Su | 2003-05-06 |
| 6361420 | Method of chemical mechanical polishing with edge control | Steven M. Zuniga, Hung Chih Chen | 2002-03-26 |