Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033964 | Chemical mechanical polishing for copper dishing control | Tyler Sherwood, Ki Cheol Ahn, Kai Ma, Raghav Sreenivasan, Jason Appell | 2024-07-09 |
| 11908678 | Method of CMP integration for improved optical uniformity in advanced LCOS back-plane | Lan Yu, Benjamin D. Briggs, Tyler Sherwood, Raghav Sreenivasan | 2024-02-20 |
| 11830824 | Edge protection on semiconductor substrates | Amirhasan Nourbakhsh, Lan Yu, Ki Cheol Ahn, Tyler Sherwood, Siddarth A. Krishnan +2 more | 2023-11-28 |
| 7040966 | Carbonation of pH controlled KOH solution for improved polishing of oxide films on semiconductor wafers | Wayne R. Swart, Gopalakrishna B. Prabhu, Srinivas R. Mirmira, Laertis Economikos, Fen F. Jamin +3 more | 2006-05-09 |
| 5636098 | Barrier seal for electrostatic chuck | Dennis S. Grimard, John F. Cameron, Chandra Deshpandey, Robert E. Ryan, Michael G. Chafin | 1997-06-03 |
| 5631803 | Erosion resistant electrostatic chuck with improved cooling system | John F. Cameron, Chandra Deshpandey | 1997-05-20 |
| 5451290 | Gas distribution system | — | 1995-09-19 |