Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12084763 | Microstructure control of conducting materials through surface coating of powders | Marc Shull, Peter Reimer, Hong P. Gao | 2024-09-10 |
| 7544398 | Controlled nano-doping of ultra thin films | Jane Chang, Trinh Tu Van, Tony P. Chiang, Karl Lesser | 2009-06-09 |
| 6821562 | Method of forming an electrically insulating sealing structure for use in a semiconductor manufacturing apparatus | Richard E. Demaray, Manuel J. Herrera, David F. Eline | 2004-11-23 |
| 6557248 | Method of fabricating an electrostatic chuck | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Alfred Goldspeil, Ron Northrup +2 more | 2003-05-06 |
| 6535372 | Controlled resistivity boron nitride electrostatic chuck apparatus for retaining a semiconductor wafer and method of fabricating the same | Vijay D. Parkhe | 2003-03-18 |
| 6436509 | Electrically insulating sealing structure and its method of use in a semiconductor manufacturing apparatus | Richard E. Demaray, Manuel J. Herrera, David F. Eline | 2002-08-20 |
| 6362097 | Collimated sputtering of semiconductor and other films | Richard E. Demaray, Rajiv Pethe | 2002-03-26 |
| 6033483 | Electrically insulating sealing structure and its method of use in a high vacuum physical vapor deposition apparatus | Richard E. Demaray, Manuel J. Herrera, David F. Eline | 2000-03-07 |
| 6023405 | Electrostatic chuck with improved erosion resistance | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Alfred Goldspeil, Ron Northrup +2 more | 2000-02-08 |
| 5996218 | Method of forming an electrostatic chuck suitable for magnetic flux processing | Shamouil Shamouilian, John F. Cameron, Yuh-Jia Su | 1999-12-07 |
| 5822171 | Electrostatic chuck with improved erosion resistance | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Alfred A. Goldspiel, Ron Northrup +2 more | 1998-10-13 |
| 5636098 | Barrier seal for electrostatic chuck | Joseph F. Salfelder, Dennis S. Grimard, John F. Cameron, Robert E. Ryan, Michael G. Chafin | 1997-06-03 |
| 5631803 | Erosion resistant electrostatic chuck with improved cooling system | John F. Cameron, Joseph F. Salfelder | 1997-05-20 |
| 5592358 | Electrostatic chuck for magnetic flux processing | Shamouil Shamouilian, John F. Cameron, Yuh-Jia Su | 1997-01-07 |
| 5055319 | Controlled high rate deposition of metal oxide films | Rointan F. Bunshah, Hans J. Doerr, Jong Seong Yoon | 1991-10-08 |
| 4931158 | Deposition of films onto large area substrates using modified reactive magnetron sputtering | Rointan F. Bunshah, Aziz A. Karim | 1990-06-05 |
| 4714625 | Deposition of films of cubic boron nitride and nitrides of other group III elements | Kasturi L. Chopra, Roitan F. Bunshah, Vasant D. Vankar | 1987-12-22 |