Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12091749 | Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet | Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Manjunath Subbanna, Ala Moradian +4 more | 2024-09-17 |
| 12084763 | Microstructure control of conducting materials through surface coating of powders | Peter Reimer, Hong P. Gao, Chandra Deshpandey | 2024-09-10 |
| 11776793 | Plasma source with ceramic electrode plate | Robert B. Moore, Jared Ahmad Lee, Tsutomu Tanaka, Alexander V. Garachtchenko, Dmitry A. Dzilno | 2023-10-03 |
| 11111582 | Porous showerhead for a processing chamber | Sumit Agarwal, Chad Peterson | 2021-09-07 |
| 6506254 | Semiconductor processing equipment having improved particle performance | William Frederick Bosch, Stephen A. Dynan | 2003-01-14 |