Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11332827 | Gas distribution plate with high aspect ratio holes and a high hole density | Sumit Agarwal, Sanjeev Baluja, Michael R. Rice | 2022-05-17 |
| 11111582 | Porous showerhead for a processing chamber | Sumit Agarwal, Marc Shull | 2021-09-07 |
| 7951730 | Decreasing the etch rate of silicon nitride by carbon addition | Ritwik Bhatia, Li-Qun Xia, Hichem M'Saad | 2011-05-31 |
| 7851384 | Method to mitigate impact of UV and E-beam exposure on semiconductor device film properties by use of a bilayer film | Yijun Liu, Huiwen Xu, Li-Qun Xia, Hichem M'Saad | 2010-12-14 |
| 7501355 | Decreasing the etch rate of silicon nitride by carbon addition | Ritwik Bhatia, Li-Qun Xia, Hichem M'Saad | 2009-03-10 |
| 6667248 | Low-bias-deposited high-density-plasma chemical-vapor-deposition silicate glass layers | Hichem M'Saad, Zhuang Li, Anchuan Wang, Farhad Moghadam | 2003-12-23 |