Issued Patents All Time
Showing 25 most recent of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136537 | Cost effective radio frequency impedance matching networks | Yue Guo, Kartik Ramaswamy, Yang Yang | 2024-11-05 |
| 11631583 | RF power source operation in plasma enhanced processes | Hari Ponnekanti, Dmitry A. Dzilno | 2023-04-18 |
| 7799698 | Deposition-selective etch-deposition process for dielectric film gapfill | Lin Zhang, Xiaolin Chen, Dongqing Li, Thanh Pham, Zhuang Li +1 more | 2010-09-21 |
| 7691753 | Deposition-selective etch-deposition process for dielectric film gapfill | Lin Zhang, Xiaolin Chen, Dongqing Li, Thanh Pham, Zhuang Li +1 more | 2010-04-06 |
| 7560377 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2009-07-14 |
| 7514353 | Contact metallization scheme using a barrier layer over a silicide layer | Timothy Weidman, Kapila Wijekoon, Zhize Zhu, Avgerinos V. Gelatos, Amit Khandelwal +3 more | 2009-04-07 |
| 7431585 | Apparatus and method for heating substrates | Jun Zhao, David H. Quach, Timothy Weidman, Rick J. Roberts, Dan Maydan | 2008-10-07 |
| 7399388 | Sequential gas flow oxide deposition technique | Michael S. Cox, Padmanabhan Krishnaraj, Thanh Pham | 2008-07-15 |
| 7381052 | Apparatus and method for heating substrates | Jun Zhao, David H. Quach, Timothy Weidman, Rick J. Roberts, Dan Maydan | 2008-06-03 |
| 7256139 | Methods and apparatus for e-beam treatment used to fabricate integrated circuit devices | Jun Zhao, Timothy Weidman, Rick J. Roberts, Li Xia, Alexandros T. Demos | 2007-08-14 |
| 7227244 | Integrated low k dielectrics and etch stops | Claes Bjorkman, Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2007-06-05 |
| 7160821 | Method of depositing low k films | Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more | 2007-01-09 |
| 7151053 | Method of depositing dielectric materials including oxygen-doped silicon carbide in damascene applications | Ju-Hyung Lee, Ping Xu, Shankar Venkataraman, Li-Qun Xia, Fei Han +5 more | 2006-12-19 |
| 7097886 | Deposition process for high aspect ratio trenches | Michael S. Cox, Padmanabhan Krishnaraj, Thanh Pham, Zhenjiang Cui | 2006-08-29 |
| 7081414 | Deposition-selective etch-deposition process for dielectric film gapfill | Lin Zhang, Xiaolin Chen, Dongqing Li, Thanh Pham, Zhuang Li +1 more | 2006-07-25 |
| 6958112 | Methods and systems for high-aspect-ratio gapfill using atomic-oxygen generation | M. Ziaul Karim, Siamak Salimian | 2005-10-25 |
| 6936551 | Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices | Jun Zhao, Timothy Weidman, Rick J. Roberts, Li-Qun Xia, Alexandros T. Demos | 2005-08-30 |
| 6930061 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2005-08-16 |
| 6926926 | Silicon carbide deposited by high density plasma chemical-vapor deposition with bias | Seon-Mee Cho, Hichem M'Saad | 2005-08-09 |
| 6890850 | Method of depositing dielectric materials in damascene applications | Ju-Hyung Lee, Ping Xu, Shankar Venkataraman, Li-Qun Xia, Fei Han +5 more | 2005-05-10 |
| 6869896 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2005-03-22 |
| 6858153 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2005-02-22 |
| 6806207 | Method of depositing low K films | Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more | 2004-10-19 |
| 6803325 | Apparatus for improving barrier layer adhesion to HDP-FSG thin films | Hichem M'Saad, Dana Tribula, Manoj Vellaikal, Sameer Desai | 2004-10-12 |
| 6743737 | Method of improving moisture resistance of low dielectric constant films | Wai-Fan Yau, David Cheung, Nasreen Chopra, Yung-Cheng Lu, Robert P. Mandal | 2004-06-01 |