Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469100 | Methods of post treating dielectric films with microwave radiation | Yong Sun, Praket P. Jha, Jingmei Liang, Martin Jay Seamons, Shashank Sharma +2 more | 2022-10-11 |
| 10934620 | Integration of dual remote plasmas sources for flowable CVD | Ying Ma, Daemian Raj, Jay D. Pinson, II, Jingmei Liang, Yizhen Zhang | 2021-03-02 |
| 10428426 | Method and apparatus to prevent deposition rate/thickness drift, reduce particle defects and increase remote plasma system lifetime | Daemian Raj, Ying Ma, Jay D. Pinson, II | 2019-10-01 |
| 10138547 | Substrate carrying apparatus and sputtering device comprising the same | Jun Liu, Xu Shi | 2018-11-27 |
| 10120215 | Apparatus for carrying substrate by off-line vacuum suction and method for transporting substrate | Xu Shi, Zhilong Xu, Jun Liu, Xiaojun Wang, Shutong Huang +2 more | 2018-11-06 |
| 10072051 | Anti-inflammatory lipopeptide and preparing method and application thereof | Yue WANG, Hongquan Li, Yuping Lai | 2018-09-11 |
| 8963095 | Electrokinetic microfluidic flow cytometer apparatuses with differential resistive particle counting and optical sorting | — | 2015-02-24 |
| 8563445 | Conformal layers by radical-component CVD | Jingmei Liang, Xiaolin Chen, Nitin K. Ingle | 2013-10-22 |
| 8318584 | Oxide-rich liner layer for flowable CVD gapfill | Jingmei Liang, Nitin K. Ingle | 2012-11-27 |
| 8188438 | Electrokinetic microfluidic flow cytometer apparatuses with differential resistive particle counting and optical sorting | — | 2012-05-29 |
| 7799698 | Deposition-selective etch-deposition process for dielectric film gapfill | Lin Zhang, Xiaolin Chen, Thanh Pham, Farhad Moghadam, Zhuang Li +1 more | 2010-09-21 |
| 7795014 | Disposable reactor module and detection system | — | 2010-09-14 |
| 7745351 | Post deposition plasma treatment to increase tensile stress of HDP-CVD SIO2 | Xiaolin Chen, Srinivas D. Nemani, Jeffrey C. Munro, Marlon Edward Menezes | 2010-06-29 |
| 7691753 | Deposition-selective etch-deposition process for dielectric film gapfill | Lin Zhang, Xiaolin Chen, Thanh Pham, Farhad Moghadam, Zhuang Li +1 more | 2010-04-06 |
| 7569382 | Disposable reactor module and detection system | — | 2009-08-04 |
| 7465680 | Post deposition plasma treatment to increase tensile stress of HDP-CVD SIO2 | Xiaolin Chen, Srinivas D. Nemani, Jeffrey C. Munro, Marlon Edward Menezes | 2008-12-16 |
| 7294588 | In-situ-etch-assisted HDP deposition | M. Ziaul Karim, Jeong Soo Byun, Thanh Pham | 2007-11-13 |
| 7196021 | HDP-CVD deposition process for filling high aspect ratio gaps | Zhengquan Tan, Walter Zygmunt | 2007-03-27 |
| 7081414 | Deposition-selective etch-deposition process for dielectric film gapfill | Lin Zhang, Xiaolin Chen, Thanh Pham, Farhad Moghadam, Zhuang Li +1 more | 2006-07-25 |
| 7049211 | In-situ-etch-assisted HDP deposition using SiF4 | M. Ziaul Karim, Jeong Soo Byun, Thanh Pham | 2006-05-23 |
| 6929700 | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD | Zhengquan Tan, Walter Zygmunt, Tetsuya Ishikawa | 2005-08-16 |
| 6914016 | HDP-CVD deposition process for filling high aspect ratio gaps | Zhengquan Tan, Walter Zygmunt | 2005-07-05 |
| 6908862 | HDP-CVD dep/etch/dep process for improved deposition into high aspect ratio features | Xiaolin Chen, Lin Zhang | 2005-06-21 |
| 6903031 | In-situ-etch-assisted HDP deposition using SiF4 and hydrogen | M. Ziaul Karim, Jeong Soo Byun, Thanh Pham | 2005-06-07 |
| 6740601 | HDP-CVD deposition process for filling high aspect ratio gaps | Zhengquan Tan, Walter Zygmunt | 2004-05-25 |