Issued Patents All Time
Showing 25 most recent of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374584 | Multi color stack for self aligned dual pattern formation for multi purpose device structures | Suketu Arun Parikh, Jingmei Liang, Shuchi Sunil Ojha, Tom Choi, Nitin K. Ingle +1 more | 2025-07-29 |
| 12334337 | Integrated flowable low-k gap-fill and plasma treatment | Myungsun Kim, Jingmei Liang, Michael Stolfi, Benjamin Colombeau | 2025-06-17 |
| 12046508 | Method of dielectric material fill and treatment | Shi YOU, He Ren, Naomi Yoshida, Nikolaos Bekiaris, Mehul Naik +2 more | 2024-07-23 |
| 11798820 | Gas delivery systems and methods | Diwakar Kedlaya, Fang Ruan, Zubin Huang, Ganesh Balasubramanian, Kaushik Alayavalli +3 more | 2023-10-24 |
| 11756796 | Techniques for improved low dielectric constant film processing | Rajesh Prasad, Shan Tang, Qi Gao, Deven Raj Mittal, Kyuha Shim | 2023-09-12 |
| 11615984 | Method of dielectric material fill and treatment | Shi YOU, He Ren, Naomi Yoshida, Nikolaos Bekiaris, Mehul Naik +2 more | 2023-03-28 |
| 11469100 | Methods of post treating dielectric films with microwave radiation | Yong Sun, Praket P. Jha, Jingmei Liang, Dongqing Li, Shashank Sharma +2 more | 2022-10-11 |
| 11276562 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa +4 more | 2022-03-15 |
| 11133177 | Oxidation reduction for SiOC film | Michael Wenyoung Tsiang, Jingmei Liang | 2021-09-28 |
| 11090683 | Cure method for cross-linking Si-hydroxyl bonds | Byung Kook Ahn, Jingmei Liang | 2021-08-17 |
| 10580623 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa +4 more | 2020-03-03 |
| 10510518 | Methods of dry stripping boron-carbon films | Kwangduk Douglas Lee, Sudha Rathi, Ramprakash Sankarakrishnan, Irfan Jamil, Bok Hoen Kim | 2019-12-17 |
| 10373822 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2019-08-06 |
| 10100408 | Edge hump reduction faceplate by plasma modulation | Sungwon Ha, Kwangduk Douglas Lee, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Ziqing Duan +5 more | 2018-10-16 |
| 9837265 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2017-12-05 |
| 9653327 | Methods of removing a material layer from a substrate using water vapor treatment | Kwangduk Douglas Lee, Sudha Rathi, Chiu Chan, Bok Heon Kim | 2017-05-16 |
| 9390910 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2016-07-12 |
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Ganesh Balasubramanian, Amit Kumar BANSAL, Eller Y. Juco, Mohamad A. Ayoub, Hyung Joon Kim +11 more | 2016-05-10 |
| 9299581 | Methods of dry stripping boron-carbon films | Kwangduk Douglas Lee, Sudha Rathi, Ramprakash Sankarakrishnan, Irfan Jamil, Bok Hoen Kim | 2016-03-29 |
| 8993454 | Ultra high selectivity doped amorphous carbon strippable hardmask development and integration | Sudha Rathi, Kwangduk Douglas Lee, Deenesh Padhi, Bok Hoen Kim, Chiu Chan | 2015-03-31 |
| 8536065 | Ultra high selectivity doped amorphous carbon strippable hardmask development and integration | Sudha Rathi, Kwangduk Douglas Lee, Deenesh Padhi, Bok Hoen Kim, Chiu Chan | 2013-09-17 |
| 8513129 | Planarizing etch hardmask to increase pattern density and aspect ratio | Kwangduk Douglas Lee, Chiu Chan, Patrick Reilly, Sudha Rathi | 2013-08-20 |
| 8361906 | Ultra high selectivity ashable hard mask film | Kwangduk Douglas Lee, Sudha Rathi, Chiu Chan, Michael H. Lin | 2013-01-29 |
| 8282734 | Methods to improve the in-film defectivity of PECVD amorphous carbon films | Deenesh Padhi, Chiu Chan, Sudha Rathi, Ganesh Balasubramanian, Jianhua Zhou +4 more | 2012-10-09 |
| 8125034 | Graded ARC for high NA and immersion lithography | Wendy H. Yeh, Matthew Spuller, Sum-Yee Betty Tang, Kwangduk Douglas Lee, Sudha Rathi | 2012-02-28 |