Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8125034 | Graded ARC for high NA and immersion lithography | Wendy H. Yeh, Martin Jay Seamons, Matthew Spuller, Kwangduk Douglas Lee, Sudha Rathi | 2012-02-28 |
| 7776516 | Graded ARC for high NA and immersion lithography | Wendy H. Yeh, Martin Jay Seamons, Matthew Spuller, Kwangduk Douglas Lee, Sudha Rathi | 2010-08-17 |
| 7407893 | Liquid precursors for the CVD deposition of amorphous carbon films | Martin Jay Seamons, Wendy H. Yeh, Sudha Rathi, Deenesh Padhi, Andy Luan +6 more | 2008-08-05 |
| 6762127 | Etch process for dielectric materials comprising oxidized organo silane materials | Yves Pierre Boiteux, Hui Chen, Ivano Gregoratto, Chang-Lin Hsieh, Hoiman Hung | 2004-07-13 |
| 6664202 | Mixed frequency high temperature nitride CVD process | May Wang, Lester D'Cruz | 2003-12-16 |
| 6380096 | In-situ integrated oxide etch process particularly useful for copper dual damascene | Hoiman Hung, Joseph P. Caulfield, Jian Ding, Tianzong Xu | 2002-04-30 |