Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11894228 | Treatments for controlling deposition defects | Ganesh Balasubramanian, Nagarajan Rajagopalan, Abdul Aziz Khaja, Prashanthi Para, Hiral D. Tailor | 2024-02-06 |
| 10971390 | Methods of minimizing wafer backside damage in semiconductor wafer processing | Abdul Aziz Khaja, Liangfa Hu, Ganesh Balasubramanian | 2021-04-06 |
| 10510518 | Methods of dry stripping boron-carbon films | Kwangduk Douglas Lee, Ramprakash Sankarakrishnan, Martin Jay Seamons, Irfan Jamil, Bok Hoen Kim | 2019-12-17 |
| 10373822 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee, Martin Jay Seamons +5 more | 2019-08-06 |
| 9837265 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee, Martin Jay Seamons +5 more | 2017-12-05 |
| 9653327 | Methods of removing a material layer from a substrate using water vapor treatment | Kwangduk Douglas Lee, Chiu Chan, Martin Jay Seamons, Bok Heon Kim | 2017-05-16 |
| 9390910 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee, Martin Jay Seamons +5 more | 2016-07-12 |
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Ganesh Balasubramanian, Amit Kumar BANSAL, Eller Y. Juco, Mohamad A. Ayoub, Hyung Joon Kim +11 more | 2016-05-10 |
| 9299581 | Methods of dry stripping boron-carbon films | Kwangduk Douglas Lee, Ramprakash Sankarakrishnan, Martin Jay Seamons, Irfan Jamil, Bok Hoen Kim | 2016-03-29 |
| 8993454 | Ultra high selectivity doped amorphous carbon strippable hardmask development and integration | Martin Jay Seamons, Kwangduk Douglas Lee, Deenesh Padhi, Bok Hoen Kim, Chiu Chan | 2015-03-31 |
| 8536065 | Ultra high selectivity doped amorphous carbon strippable hardmask development and integration | Martin Jay Seamons, Kwangduk Douglas Lee, Deenesh Padhi, Bok Hoen Kim, Chiu Chan | 2013-09-17 |
| 8513129 | Planarizing etch hardmask to increase pattern density and aspect ratio | Martin Jay Seamons, Kwangduk Douglas Lee, Chiu Chan, Patrick Reilly | 2013-08-20 |
| 8361906 | Ultra high selectivity ashable hard mask film | Kwangduk Douglas Lee, Martin Jay Seamons, Chiu Chan, Michael H. Lin | 2013-01-29 |
| 8282734 | Methods to improve the in-film defectivity of PECVD amorphous carbon films | Deenesh Padhi, Chiu Chan, Ganesh Balasubramanian, Jianhua Zhou, Karthik Janakiraman +4 more | 2012-10-09 |
| 8211626 | Maintenance of photoresist activity on the surface of dielectric arcs for 90 nm feature sizes | Sang-Hoon Ahn, Heraldo Bothelho | 2012-07-03 |
| 8183150 | Semiconductor device having silicon carbide and conductive pathway interface | Judy H. Huang, Christopher Dennis Bencher, Christopher S. Ngai, Bok Hoen Kim | 2012-05-22 |
| 8125034 | Graded ARC for high NA and immersion lithography | Wendy H. Yeh, Martin Jay Seamons, Matthew Spuller, Sum-Yee Betty Tang, Kwangduk Douglas Lee | 2012-02-28 |
| 8105465 | Method for depositing conformal amorphous carbon film by plasma-enhanced chemical vapor deposition (PECVD) | Kwangduk Douglas Lee, Takashi Morii, Yoichi Suzuki, Martin Jay Seamons, Deenesh Padhi +2 more | 2012-01-31 |
| 8088563 | Reduction in photoresist footing undercut during development of feature sizes of 120NM or less | Sang-Hoon Ahn, Heraldo Bothelho | 2012-01-03 |
| 7867578 | Method for depositing an amorphous carbon film with improved density and step coverage | Deenesh Padhi, Hyoung-Chan Ha, Derek R. Witty, Chiu Chan, Sohyun Park +6 more | 2011-01-11 |
| 7776516 | Graded ARC for high NA and immersion lithography | Wendy H. Yeh, Martin Jay Seamons, Matthew Spuller, Sum-Yee Betty Tang, Kwangduk Douglas Lee | 2010-08-17 |
| 7638440 | Method of depositing an amorphous carbon film for etch hardmask application | Yuxiang Wang, Michael Kwan, Hichem M'Saad | 2009-12-29 |
| 7514125 | Methods to improve the in-film defectivity of PECVD amorphous carbon films | Deenesh Padhi, Chiu Chan, Ganesh Balasubramanian, Jianhua Zhou, Karthik Janakiraman +4 more | 2009-04-07 |
| 7407893 | Liquid precursors for the CVD deposition of amorphous carbon films | Martin Jay Seamons, Wendy H. Yeh, Deenesh Padhi, Andy Luan, Sum-Yee Betty Tang +6 more | 2008-08-05 |
| 7105460 | Nitrogen-free dielectric anti-reflective coating and hardmask | Bok Hoen Kim, Sang-Hoon Ahn, Christopher Dennis Bencher, Yuxiang Wang, Hichem M'Saad +1 more | 2006-09-12 |