Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347679 | System and method for radical and thermal processing of substrates | Xinming Zhang, Abhilash J. Mayur, Shashank Sharma, Norman L. Tam | 2025-07-01 |
| 12327763 | Treatment methods for titanium nitride films | Xinming Zhang, Shashank Sharma, Abhilash J. Mayur, Norman L. Tam | 2025-06-10 |
| 11978646 | Thermal chamber with improved thermal uniformity | Dongming Iu, Kartik Shah, Norman L. Tam, Jau-Jiun CHEN, Kong CHAN +4 more | 2024-05-07 |
| 11823901 | System and method for radical and thermal processing of substrates | Xinming Zhang, Abhilash J. Mayur, Shashank Sharma, Norman L. Tam | 2023-11-21 |
| 11817297 | System and method for managing substrate outgassing | Dongming Iu | 2023-11-14 |
| 11587789 | System and method for radical and thermal processing of substrates | Xinming Zhang, Abhilash J. Mayur, Shashank Sharma, Norman L. Tam, Zeqiong Zhao | 2023-02-21 |
| 11348769 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Kong CHAN, Dongming Iu +1 more | 2022-05-31 |
| 10770272 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Kong CHAN, Dongming Iu | 2020-09-08 |
| 8125034 | Graded ARC for high NA and immersion lithography | Wendy H. Yeh, Martin Jay Seamons, Sum-Yee Betty Tang, Kwangduk Douglas Lee, Sudha Rathi | 2012-02-28 |
| 7851385 | Low temperature conformal oxide formation and applications | Melody Agustin, Meiyee Shek, Li-Qun Xia, Reza Arghavani | 2010-12-14 |
| 7776516 | Graded ARC for high NA and immersion lithography | Wendy H. Yeh, Martin Jay Seamons, Sum-Yee Betty Tang, Kwangduk Douglas Lee, Sudha Rathi | 2010-08-17 |
| 6786977 | Gas-expanded liquids, methods of use thereof, and systems using gas-expanded liquids for cleaning integrated circuits | Dennis W. Hess | 2004-09-07 |