| 12347679 |
System and method for radical and thermal processing of substrates |
Abhilash J. Mayur, Shashank Sharma, Norman L. Tam, Matthew Spuller |
2025-07-01 |
| 12327763 |
Treatment methods for titanium nitride films |
Shashank Sharma, Abhilash J. Mayur, Norman L. Tam, Matthew Spuller |
2025-06-10 |
| 11859277 |
Catalyst enhanced molybdenum deposition and gap fill |
Xi Cen, Kai Wu, Seshadri Ganguli, Norman L. Tam, Abhilash J. Mayur |
2024-01-02 |
| 11823901 |
System and method for radical and thermal processing of substrates |
Abhilash J. Mayur, Shashank Sharma, Norman L. Tam, Matthew Spuller |
2023-11-21 |
| 11587789 |
System and method for radical and thermal processing of substrates |
Abhilash J. Mayur, Shashank Sharma, Norman L. Tam, Matthew Spuller, Zeqiong Zhao |
2023-02-21 |
| 10347455 |
Miniature circuit breaker capable of rapid breaking |
— |
2019-07-09 |
| 10014185 |
Selective etch of metal nitride films |
Liqi Wu, Wenyu Zhang, Shih Chung Chen, Wei V. Tang, Leung Kway Lee +1 more |
2018-07-03 |