Issued Patents All Time
Showing 25 most recent of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347679 | System and method for radical and thermal processing of substrates | Xinming Zhang, Shashank Sharma, Norman L. Tam, Matthew Spuller | 2025-07-01 |
| 12327763 | Treatment methods for titanium nitride films | Xinming Zhang, Shashank Sharma, Norman L. Tam, Matthew Spuller | 2025-06-10 |
| 12261047 | Doping techniques | Wolfgang Aderhold, Yi-Chiau Huang, Wei Liu, Benjamin Colombeau | 2025-03-25 |
| 12085965 | Systems, methods, and apparatus for correcting thermal processing of substrates | Wolfgang Aderhold, Yi-Cheng Wang | 2024-09-10 |
| 11978646 | Thermal chamber with improved thermal uniformity | Dongming Iu, Kartik Shah, Norman L. Tam, Matthew Spuller, Jau-Jiun CHEN +4 more | 2024-05-07 |
| 11945045 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Aaron Muir Hunter +2 more | 2024-04-02 |
| 11859277 | Catalyst enhanced molybdenum deposition and gap fill | Xi Cen, Kai Wu, Seshadri Ganguli, Xinming Zhang, Norman L. Tam | 2024-01-02 |
| 11823901 | System and method for radical and thermal processing of substrates | Xinming Zhang, Shashank Sharma, Norman L. Tam, Matthew Spuller | 2023-11-21 |
| 11587789 | System and method for radical and thermal processing of substrates | Xinming Zhang, Shashank Sharma, Norman L. Tam, Matthew Spuller, Zeqiong Zhao | 2023-02-21 |
| 11492698 | Optically transparent pedestal for fluidly supporting a substrate | Wolfgang Aderhold | 2022-11-08 |
| 11469100 | Methods of post treating dielectric films with microwave radiation | Yong Sun, Praket P. Jha, Jingmei Liang, Martin Jay Seamons, Dongqing Li +2 more | 2022-10-11 |
| 11443948 | Doping techniques | Wolfgang Aderhold, Yi-Chiau Huang, Wei Liu, Benjamin Colombeau | 2022-09-13 |
| D959490 | Display screen or portion thereof with graphical user interface | Kartik Shah, Kartik Santhanam, Bindusagar Marath Sankarathodi, Dayal Ramachandran, Amritha Rammohan +2 more | 2022-08-02 |
| 10857623 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Aaron Muir Hunter +2 more | 2020-12-08 |
| 10840100 | Method of thermal processing structures formed on a substrate | Paul G. Carey, Aaron Muir Hunter, Dean Jennings, Stephen Moffatt, William Schaffer +2 more | 2020-11-17 |
| 10455642 | Rapid thermal processing chamber with linear control lamps | Preetham Rao | 2019-10-22 |
| 10234772 | Overlay error correction | Mangesh Ashok BANGAR, Bruce E. Adams, Kelly E. Hollar, Huixiong Dai, Jaujiun Chen | 2019-03-19 |
| 10141191 | Method of thermal processing structures formed on a substrate | Paul G. Carey, Aaron Muir Hunter, Dean Jennings, Stephen Moffatt, William Schaffer +2 more | 2018-11-27 |
| 9864280 | Overlay error correction | Mangesh Ashok BANGAR, Bruce E. Adams, Kelly E. Hollar, Huixiong Dai, Jaujiun Chen | 2018-01-09 |
| 9839976 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Aaron Muir Hunter +2 more | 2017-12-12 |
| 9737959 | Thermal processing by scanning a laser line beam | Dean Jennings, Mark Yam, Vernon Behrens, Paul A. O'Brien, Leonid M. Teritski +1 more | 2017-08-22 |
| 9595459 | Managing thermal budget in annealing of substrates | Stephen Moffatt, Sundar Ramamurthy, Joseph M. Ranish, Aaron Muir Hunter | 2017-03-14 |
| 9263265 | Crystallization of amorphous films and grain growth using combination of laser and rapid thermal annealing | Shashank Sharma, Shankar Muthukrishnan | 2016-02-16 |
| 9130001 | Edge ring for a thermal processing chamber | Blake Koelmel, Joseph M. Ranish | 2015-09-08 |
| 9114479 | Managing thermal budget in annealing of substrates | Stephen Moffatt, Sundar Ramamurthy, Joseph M. Ranish, Aaron Muir Hunter | 2015-08-25 |