Issued Patents All Time
Showing 25 most recent of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12390843 | Rapid thermal processing (RTP) chamber outgassing removal | — | 2025-08-19 |
| 12379253 | Emissivity independence tuning | — | 2025-08-05 |
| 12366481 | Reflector plate for substrate processing | — | 2025-07-22 |
| 12278127 | Auto fine-tuner for desired temperature profile | Yi-Cheng Wang | 2025-04-15 |
| 12278101 | Coded substrate material identifier communication tool | Boris Axelrod, Maxim D. SHAPOSHNIKOV, Dayal Ramachandran, Bindusagar Marath Sankarathodi | 2025-04-15 |
| 12261047 | Doping techniques | Yi-Chiau Huang, Wei Liu, Benjamin Colombeau, Abhilash J. Mayur | 2025-03-25 |
| 12176242 | Rotatable thermal processing chamber | Dongming Iu | 2024-12-24 |
| 12169098 | RTP substrate temperature one for all control algorithm | Yi-Cheng Wang | 2024-12-17 |
| 12159797 | Pyrometry error detection sensor for RTP temperature control system | Samuel C. Howells, Amritha Rammohan, Huy Q. Nguyen | 2024-12-03 |
| 12085965 | Systems, methods, and apparatus for correcting thermal processing of substrates | Abhilash J. Mayur, Yi-Cheng Wang | 2024-09-10 |
| 12080573 | Temperature offset and zone control tuning | Ole LUCKNER, Shankar Muthukrishnan | 2024-09-03 |
| 11942381 | System for non radial temperature control for rotating substrates | Aaron Muir Hunter, Joseph M. Ranish | 2024-03-26 |
| 11942345 | Automated substrate placement to chamber center | — | 2024-03-26 |
| 11915953 | Apparatus, systems, and methods of measuring edge ring distance for thermal processing chambers | Ole LUCKNER | 2024-02-27 |
| 11828656 | Reflector plate for substrate processing | — | 2023-11-28 |
| 11735447 | Enhanced process and hardware architecture to detect and correct realtime product substrates | Kartik Santhanam, Kartik Shah, Martin A. Hilkene, Stephen Moffatt | 2023-08-22 |
| 11664250 | Methods and apparatus for measuring edge ring temperature | Ji-Dih HU, Dongming Iu | 2023-05-30 |
| 11492698 | Optically transparent pedestal for fluidly supporting a substrate | Abhilash J. Mayur | 2022-11-08 |
| 11469100 | Methods of post treating dielectric films with microwave radiation | Yong Sun, Praket P. Jha, Jingmei Liang, Martin Jay Seamons, Dongqing Li +2 more | 2022-10-11 |
| 11443948 | Doping techniques | Yi-Chiau Huang, Wei Liu, Benjamin Colombeau, Abhilash J. Mayur | 2022-09-13 |
| 11373871 | Methods and apparatus for integrated selective monolayer doping | Benjamin Colombeau, Andy Lo, Yi-Chiau Huang | 2022-06-28 |
| 11342209 | Methods and apparatus for measuring edge ring temperature | Ji-Dih HU, Dongming Iu | 2022-05-24 |
| 10948353 | Thermal processing chamber with low temperature control | Lara Hawrylchak, Samuel C. Howells, Leonid M. Tertitski, Michael S. Liu, Dongming Iu +2 more | 2021-03-16 |
| 10741457 | System for non radial temperature control for rotating substrates | Aaron Muir Hunter, Joseph M. Ranish | 2020-08-11 |
| 10571337 | Thermal cooling member with low temperature control | Lara Hawrylchak, Samuel C. Howells, Leonid M. Tertitski, Michael S. Liu, Dongming Iu +2 more | 2020-02-25 |