| 12159797 |
Pyrometry error detection sensor for RTP temperature control system |
Wolfgang Aderhold, Amritha Rammohan, Huy Q. Nguyen |
2024-12-03 |
$97,002,000 |
| 12078547 |
Etalon thermometry for plasma environments |
Bruce E. Adams, Alvaro Garcia, Barry Craver, Tony Jefferson GNANAPRAKASA, Lei Lian |
2024-09-03 |
$44,731,000 |
| 11703391 |
Continuous spectra transmission pyrometry |
— |
2023-07-18 |
$58,990,000 |
| 11562915 |
Methods, systems, and apparatus for optically monitoring individual lamps |
Ji-Dih HU, Chaitanya A. PRASAD, Dongming Iu, Vilen K. NESTOROV |
2023-01-24 |
$45,726,000 |
| 11280686 |
Temperature measurement using etalons |
Bruce E. Adams |
2022-03-22 |
$64,102,000 |
| 10948353 |
Thermal processing chamber with low temperature control |
Lara Hawrylchak, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu, Dongming Iu +2 more |
2021-03-16 |
$56,717,000 |
| 10845249 |
Continuous spectra transmission pyrometry |
— |
2020-11-24 |
$38,395,000 |
| 10571337 |
Thermal cooling member with low temperature control |
Lara Hawrylchak, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu, Dongming Iu +2 more |
2020-02-25 |
$22,337,000 |
| 10537965 |
Fiber array line generator |
Douglas E. Holmgren, Aaron Muir Hunter, Theodore P. Moffitt, Diwakar Kedlaya |
2020-01-21 |
$34,637,000 |
| 10281335 |
Pulsed radiation sources for transmission pyrometry |
— |
2019-05-07 |
$13,988,000 |
| 10181409 |
Thermal processing apparatus |
Stephen Moffatt, Douglas E. Holmgren, Edric Tong, Bruce E. Adams, Jiping Li +1 more |
2019-01-15 |
$61,415,000 |
| 10072986 |
Detector for low temperature transmission pyrometry |
— |
2018-09-11 |
$27,448,000 |
| 9953851 |
Process sheet resistance uniformity improvement using multiple melt laser exposures |
Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Kim Vellore, Stephen Moffatt |
2018-04-24 |
$74,029,000 |
| 9927622 |
Multiple beam combiner for laser processing apparatus |
Stephen Moffatt, Douglas E. Holmgren, Edric Tong, Bruce E. Adams, Jiping Li +1 more |
2018-03-27 |
$21,583,000 |
| 9908200 |
Apparatus and method of improving beam shaping and beam homogenization |
Bruce E. Adams, Dean Jennings, Jiping Li, Timothy N. Thomas, Stephen Moffatt |
2018-03-06 |
$32,877,000 |
| 9636778 |
Optical design for line generation using microlens array |
Douglas E. Holmgren |
2017-05-02 |
$24,975,000 |
| 9390926 |
Process sheet resistance uniformity improvement using multiple melt laser exposures |
Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Kim Vellore, Stephen Moffatt |
2016-07-12 |
$13,832,000 |
| 9285595 |
Multiple beam combiner for laser processing apparatus |
Stephen Moffatt, Douglas E. Holmgren, Edric Tong, Bruce E. Adams, Jiping Li +1 more |
2016-03-15 |
$10,944,000 |
| 9146337 |
Apparatus for speckle reduction, pulse stretching, and beam homogenization |
Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Douglas E. Holmgren, Theodore P. Moffitt +1 more |
2015-09-29 |
$14,922,000 |
| 8970963 |
Multiple beam combiner for laser processing apparatus |
Stephen Moffatt, Douglas E. Holmgren, Edric Tong, Bruce E. Adams, Jiping Li +1 more |
2015-03-03 |
$11,301,000 |
| 8946594 |
Optical design for line generation using microlens array |
Douglas E. Holmgren |
2015-02-03 |
$26,006,000 |
| 8829392 |
Apparatus and method of improving beam shaping and beam homogenization |
Bruce E. Adams, Dean Jennings, Jiping Li, Timothy N. Thomas, Stephen Moffatt |
2014-09-09 |
$30,186,000 |
| 8693095 |
Method and apparatus for decorrelation of spatially and temporally coherent light |
Dean Jennings, Timothy N. Thomas, Stephen Moffatt, Jiping Li, Bruce E. Adams |
2014-04-08 |
$11,783,000 |
| 8569187 |
Thermal processing apparatus |
Stephen Moffatt, Douglas E. Holmgren, Edric Tong, Bruce E. Adams, Jiping Li +1 more |
2013-10-29 |
$9,867,000 |
| 8432613 |
Multi-stage optical homogenization |
Dean Jennings, Timothy N. Thomas, Bruce E. Adams, Jiping Li |
2013-04-30 |
$19,200,000 |
