Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400904 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Anzhong Chang +10 more | 2025-08-26 |
| 11859307 | Apparatus and methods for alignment of a susceptor | James Francis Mack, Paul Brillhart | 2024-01-02 |
| 11848226 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Anzhong Chang +10 more | 2023-12-19 |
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Anzhong Chang +10 more | 2021-02-23 |
| 10883190 | Apparatus and methods for alignment of a susceptor | James Francis Mack, Paul Brillhart | 2021-01-05 |
| 10808310 | Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber | Vishwas Kumar Pandey, Kartik Shah, Prashanth Vasudeva | 2020-10-20 |
| 10727093 | Light pipe window structure for low pressure thermal processes | Paul Brillhart, Joseph M. Ranish, Aaron Muir Hunter, James Francis Mack, Kin Pong Lo +3 more | 2020-07-28 |
| 10619235 | Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber | Vishwas Kumar Pandey, Kartik Shah, Prashanth Vasudeva | 2020-04-14 |
| 10458040 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Kin Pong Lo, James Francis Mack, Zhiyuan Ye +5 more | 2019-10-29 |
| 10269614 | Susceptor design to reduce edge thermal peak | Schubert S. Chu, Kartik Shah, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak +8 more | 2019-04-23 |
| 10181409 | Thermal processing apparatus | Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Bruce E. Adams, Jiping Li +1 more | 2019-01-15 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Anzhong Chang +10 more | 2018-08-28 |
| 9927622 | Multiple beam combiner for laser processing apparatus | Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Bruce E. Adams, Jiping Li +1 more | 2018-03-27 |
| 9845550 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Kin Pong Lo, James Francis Mack, Zhiyuan Ye +5 more | 2017-12-19 |
| 9285595 | Multiple beam combiner for laser processing apparatus | Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Bruce E. Adams, Jiping Li +1 more | 2016-03-15 |
| 8970963 | Multiple beam combiner for laser processing apparatus | Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Bruce E. Adams, Jiping Li +1 more | 2015-03-03 |
| 8569187 | Thermal processing apparatus | Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Bruce E. Adams, Jiping Li +1 more | 2013-10-29 |
| 8354001 | Processing thin wafers | Terry Bluck, Stuart Scollay | 2013-01-15 |
| 8206551 | Processing thin wafers | Terry Bluck, Stuart Scollay | 2012-06-26 |
| 7611322 | Processing thin wafers | Terry Bluck, Stuart Scollay | 2009-11-03 |
| 7177019 | Apparatus for imaging metrology | Fred E. Stanke, Douglas E. Ruth, James Cahill, Michael Weber, Clinton Carlisle +2 more | 2007-02-13 |
| 7042580 | Apparatus for imaging metrology | Fred E. Stanke, Clinton Carlisle, Hung Pham, Douglas E. Ruth, James Cahill +2 more | 2006-05-09 |
| 6919958 | Wafer metrology apparatus and method | Fred E. Stanke, Clinton Carlisle, Hung Pham, Douglas E. Ruth, James Cahill +3 more | 2005-07-19 |
| 6572456 | Bathless wafer measurement apparatus and method | Michael Weber-Grabau, Ivelin A. Anguelov, Adam E. Norton, Fred E. Stanke, Badru D. Hyatt | 2003-06-03 |
| 6563586 | Wafer metrology apparatus and method | Fred E. Stanke, Clinton Carlisle, Hung Pham, Douglas E. Ruth, James Cahill +2 more | 2003-05-13 |