Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400904 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2025-08-26 |
| 11848226 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2023-12-19 |
| 11495479 | Light pipe window structure for thermal chamber applications and processes | Joseph M. Ranish, Aaron Muir Hunter | 2022-11-08 |
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2021-02-23 |
| 10727093 | Light pipe window structure for low pressure thermal processes | Paul Brillhart, Joseph M. Ranish, Aaron Muir Hunter, Edric Tong, James Francis Mack +3 more | 2020-07-28 |
| 10458040 | Upper dome with injection assembly | Paul Brillhart, Edric Tong, Kin Pong Lo, James Francis Mack, Zhiyuan Ye +5 more | 2019-10-29 |
| 10410890 | Light pipe window structure for thermal chamber applications and processes | Joseph M. Ranish, Aaron Muir Hunter | 2019-09-10 |
| 10269614 | Susceptor design to reduce edge thermal peak | Schubert S. Chu, Kartik Shah, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak +8 more | 2019-04-23 |
| 10130958 | Showerhead assembly with gas injection distribution devices | Alexander Tam, Sumedh Acharya | 2018-11-20 |
| 10119192 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +1 more | 2018-11-06 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |
| 9845550 | Upper dome with injection assembly | Paul Brillhart, Edric Tong, Kin Pong Lo, James Francis Mack, Zhiyuan Ye +5 more | 2017-12-19 |
| 9768043 | Quartz upper and lower domes | Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir, David K. Carlson +9 more | 2017-09-19 |
| 9322097 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +1 more | 2016-04-26 |
| 8910644 | Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas | Hua Chung, Xizi Dong, Kyawwin Jason Maung, Hiroji Hanawa, Sang Won Kang +6 more | 2014-12-16 |
| D716240 | Lower chamber liner | Shu-Kwan LAU, Mehmet Tugrul Samir, Paul Brillhart, Richard O. Collins | 2014-10-28 |
| D711331 | Upper chamber liner | Shu-Kwan LAU, Mehmet Tugrul Samir, Paul Brillhart, Richard O. Collins | 2014-08-19 |
| 8679956 | Multiple precursor showerhead with by-pass ports | Alexander Tam, Sumedh Acharya | 2014-03-25 |
| 8568529 | HVPE chamber hardware | Tetsuya Ishikawa, David H. Quach, Olga Kryliouk, Yuriy Melnik, Harsukhdeep Singh Ratia +2 more | 2013-10-29 |
| 8491720 | HVPE precursor source hardware | Tetsuya Ishikawa, David H. Quach, Olga Kryliouk, Yuriy Melnik, Harsukhdeep Singh Ratia +2 more | 2013-07-23 |
| 8361892 | Multiple precursor showerhead with by-pass ports | Alexander Tam, Sumedh Acharya | 2013-01-29 |
| D664170 | Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass | Hua Chung, Xizi Dong, Kyawwin Jason Maung, Hiroji Hanawa, Sang Won Kang +6 more | 2012-07-24 |
| D664172 | Dome assembly for a deposition chamber | Tetsuya Ishikawa, David H. Quach, Olga Kryliouk, Yuriy Melnik, Harsukhdeep Singh Ratia +2 more | 2012-07-24 |
| 8183132 | Methods for fabricating group III nitride structures with a cluster tool | Sandeep Nijhawan, Brian H. Burrows, Tetsuya Ishikawa, Olga Kryliouk, Anand Vasudev +6 more | 2012-05-22 |
| 7214297 | Substrate support element for an electrochemical plating cell | You Wang, John O. Dukovic | 2007-05-08 |