Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8980379 | Gas distribution showerhead and method of cleaning | Hiroji Hanawa, Hua Chung | 2015-03-17 |
| 8910644 | Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas | Hua Chung, Xizi Dong, Hiroji Hanawa, Sang Won Kang, David H. Quach +6 more | 2014-12-16 |
| 8455374 | Radiation heating efficiency by increasing optical absorption of a silicon containing material | Hiroji Hanawa | 2013-06-04 |
| D664170 | Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass | Hua Chung, Xizi Dong, Hiroji Hanawa, Sang Won Kang, David H. Quach +6 more | 2012-07-24 |