Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11434568 | Heated ceramic faceplate | Juan Carlos Rocha-Alvarez | 2022-09-06 |
| 10177050 | Methods and apparatus for controlling substrate uniformity | S. M. Reza Sadjadi, Dmitry Lubomirsky, Hamid Noorbakhsh, John Zheng Ye, Sean S. Kang | 2019-01-08 |
| 9412579 | Methods and apparatus for controlling substrate uniformity | S. M. Reza Sadjadi, Dmitry Lubomirsky, Hamid Noorbakhsh, John Zheng Ye, Sean S. Kang | 2016-08-09 |
| 8910644 | Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas | Hua Chung, Xizi Dong, Kyawwin Jason Maung, Hiroji Hanawa, Sang Won Kang +6 more | 2014-12-16 |
| 8568529 | HVPE chamber hardware | Tetsuya Ishikawa, Anzhong Chang, Olga Kryliouk, Yuriy Melnik, Harsukhdeep Singh Ratia +2 more | 2013-10-29 |
| 8550031 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2013-10-08 |
| 8491720 | HVPE precursor source hardware | Tetsuya Ishikawa, Anzhong Chang, Olga Kryliouk, Yuriy Melnik, Harsukhdeep Singh Ratia +2 more | 2013-07-23 |
| D664172 | Dome assembly for a deposition chamber | Tetsuya Ishikawa, Anzhong Chang, Olga Kryliouk, Yuriy Melnik, Harsukhdeep Singh Ratia +2 more | 2012-07-24 |
| D664170 | Cleaning plate for inducing turbulent flow of a processing chamber cleaning glass | Hua Chung, Xizi Dong, Kyawwin Jason Maung, Hiroji Hanawa, Sang Won Kang +6 more | 2012-07-24 |
| 8215262 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-07-10 |
| 8183132 | Methods for fabricating group III nitride structures with a cluster tool | Sandeep Nijhawan, Brian H. Burrows, Tetsuya Ishikawa, Olga Kryliouk, Anand Vasudev +6 more | 2012-05-22 |
| 8181596 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-05-22 |
| 8146530 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-04-03 |
| D642605 | Lid assembly for a substrate processing chamber | Tetsuya Ishikawa, Alexander Tam | 2011-08-02 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2011-04-12 |
| 7743728 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-06-29 |
| 7741585 | Integrated thermal unit having a shuttle with two-axis movement | Martin Jeff Salinas | 2010-06-22 |
| 7694647 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-04-13 |
| 7601934 | Integrated thermal unit having a shuttle with a temperature controlled surface | Martin Jeff Salinas | 2009-10-13 |
| 7460972 | Methods and systems for performing real-time wireless temperature measurement for semiconductor substrates | Sharathchandra Somayaji, Christopher Laurent Beaudry | 2008-12-02 |
| 7431585 | Apparatus and method for heating substrates | Jun Zhao, Timothy Weidman, Rick J. Roberts, Farhad Moghadam, Dan Maydan | 2008-10-07 |
| 7427728 | Zone control heater plate for track lithography systems | Martin Jeff Salinas | 2008-09-23 |
| 7381052 | Apparatus and method for heating substrates | Jun Zhao, Timothy Weidman, Rick J. Roberts, Farhad Moghadam, Dan Maydan | 2008-06-03 |
| 7357842 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2008-04-15 |
| 7297906 | Integrated thermal unit having a shuttle with two-axis movement | Martin Jeff Salinas | 2007-11-20 |